Influence of gas mixing on the lateral uniformity in horizontal MOVPE reactors
I. Moerman, G. Coudenys, P. Demeester, B. Turner, J. CrawleyVolume:
107
Year:
1991
Language:
english
Pages:
6
DOI:
10.1016/0022-0248(91)90452-b
File:
PDF, 298 KB
english, 1991