Trisdimethylaminoarsine as As source for the LP-MOVPE of GaAs
M.H. Zimmer, R. Hövel, W. Brysch, A. Brauers, P. BalkVolume:
107
Year:
1991
Language:
english
Pages:
2
DOI:
10.1016/0022-0248(91)90482-k
File:
PDF, 90 KB
english, 1991