MOVPE growth of uniform AlGaAs and InGaAs using organoarsine with inverted-horizontal atmospheric-pressure reactor
T. Kikkawa, H. Tanaka, J. KomenoVolume:
107
Year:
1991
Language:
english
Pages:
6
DOI:
10.1016/0022-0248(91)90488-q
File:
PDF, 363 KB
english, 1991