Growth of highly uniform, reproducible InGaAs films in a multiwafer rotating disk reactor by MOCVD
M.A. McKee, P.E. Norris, R.A. Stall, G.S. Tompa, C.S. Chern, D. Noh, S.S. Kang, T.J. JasinskiVolume:
107
Year:
1991
Language:
english
Pages:
7
DOI:
10.1016/0022-0248(91)90501-u
File:
PDF, 364 KB
english, 1991