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A new selective MOVPE regrowth process utilizing in-situ vapor phase etching for optoelectronic integrated circuits
Kenji Shimoyama, Yuichi Inoue, Masanori Katoh, Hideki Gotoh, Yoshihiro Suzuki, Hiroyoshi YajimaVolume:
107
Year:
1991
Language:
english
Pages:
5
DOI:
10.1016/0022-0248(91)90555-j
File:
PDF, 243 KB
english, 1991