A novel technique for the preservation of gratings in InP and InGaAsP and for the simultaneous preservation of InP, InGaAs, and InGaAsP in OMCVD
R. Bhat, M.A. Koza, C.E. Zah, C. Caneau, C.C. Chang, S.A. Schwarz, A.S. Gozdz, P.S.D. Lin, A. Yi-YanVolume:
107
Year:
1991
Language:
english
Pages:
7
DOI:
10.1016/0022-0248(91)90573-n
File:
PDF, 452 KB
english, 1991