Qualification of OMVPE AlGaAs/GaAs HBT structures using nondestructive photoreflectance spectroscopy
N. Bottka, D.K. Gaskill, P.D. Wright, R.W. Kaliski, D.A. WilliamsVolume:
107
Year:
1991
Language:
english
Pages:
5
DOI:
10.1016/0022-0248(91)90576-q
File:
PDF, 364 KB
english, 1991