Ultrasonic etching of GaAs in CrO3-HF aqueous solutions

Ultrasonic etching of GaAs in CrO3-HF aqueous solutions

Nuofu Chen
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Volume:
129
Year:
1993
Language:
english
Pages:
2
DOI:
10.1016/0022-0248(93)90511-t
File:
PDF, 423 KB
english, 1993
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