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Plasma-cracked supply of group V and group VI elements for low temperature epitaxy
T. Hariu, S. Yamauchi, S.F. Fang, T. Ohshima, T. HamadaVolume:
136
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0022-0248(94)90401-4
File:
PDF, 292 KB
english, 1994