Surface reactivity and stability of Ga-deposited GaAs oxide...

Surface reactivity and stability of Ga-deposited GaAs oxide mask for selective area growth of GaAs

Masahiro Sasaki, Seikoh Yoshida
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Volume:
136
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0022-0248(94)90417-0
File:
PDF, 437 KB
english, 1994
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