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Determination of the sticking coefficient of disilane on Si(001) using the first reflection high energy electron diffraction oscillation period
K. Werner, S. Butzke, S. Radelaar, P. BalkVolume:
136
Year:
1994
Language:
english
Pages:
6
DOI:
10.1016/0022-0248(94)90433-2
File:
PDF, 496 KB
english, 1994