Determination of the sticking coefficient of disilane on...

Determination of the sticking coefficient of disilane on Si(001) using the first reflection high energy electron diffraction oscillation period

K. Werner, S. Butzke, S. Radelaar, P. Balk
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Volume:
136
Year:
1994
Language:
english
Pages:
6
DOI:
10.1016/0022-0248(94)90433-2
File:
PDF, 496 KB
english, 1994
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