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Controlled carbonization of Si(001) surface using hydrocarbon radicals in ultrahigh vacuum
Tomoaki Hatayama, Yoichiro Tarui, Tastuo Yoshinobu, Takashi Fuyuki, Hiroyuki MatsunamiVolume:
136
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0022-0248(94)90435-9
File:
PDF, 568 KB
english, 1994