Efficiency of arsenic and phosphorus precursors investigated by reflectance anisotropy spectroscopy
P. Kurpas, J. Jönsson, W. Richter, D. Gutsche, M. Pristovsek, M. ZornVolume:
145
Year:
1994
Language:
english
Pages:
8
DOI:
10.1016/0022-0248(94)91026-x
File:
PDF, 655 KB
english, 1994