Metalorganic molecular beam epitaxy and etching of GaAs and GaSb using trisdimethylaminoarsenic and trisdimethylaminoantimony
H. Asahi, X.F. Liu, K. Inoue, D. Marx, K. Asami, K. Miki, S. GondaVolume:
145
Year:
1994
Language:
english
Pages:
7
DOI:
10.1016/0022-0248(94)91124-x
File:
PDF, 613 KB
english, 1994