Gas source MBE growth of SiSiGe device materials
K. Werner, A. Storm, S. Butzke, J.W. Maes, M. van Rooy, P. Alkemade, E. Algra, M. Somers, B. de Lange, E. van der Drift, T. Zijlstra, S. RadelaarVolume:
164
Year:
1996
Language:
english
Pages:
12
DOI:
10.1016/0022-0248(95)00961-2
File:
PDF, 1.03 MB
english, 1996