Etching of deep V-groove channels on a (001) InP substrate and regrowth by gas source molecular beam epitaxy
A. Lestra, F. Gaborit, E. Gaumont-Goarin, L. Goldstein, D. Lesterlin, Ph. Pagnod-RossiauxVolume:
167
Year:
1996
Language:
english
Pages:
6
DOI:
10.1016/0022-0248(96)00261-8
File:
PDF, 373 KB
english, 1996