Process variability in surface roughening of SU-8 by oxygen...

Microsystem Technologies 2013 / 07 Vol. 19; Iss. 7

Process variability in surface roughening of SU-8 by oxygen plasma

Nagaraju Oruganti, Michel Goedert, Sang-Joon John Lee
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Volume:
19
Language:
english
DOI:
10.1007/s00542-012-1680-0
Date:
July, 2013
File:
PDF, 644 KB
english, 2013
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