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Volume 19; Issue 7
Main
Microsystem Technologies
Volume 19; Issue 7
Microsystem Technologies
Volume 19; Issue 7
1
Suspended bimaterial microchannel resonators for thermal sensing of local heat generation in liquid
Toda, Masaya
,
Otake, Tomoyuki
,
Miyashita, Hidetoshi
,
Kawai, Yusuke
,
Ono, Takahito
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 832 KB
Your tags:
english, 2013
2
Raman spectroscopy characterization of a thermal bimorph actuator used in a bio-MEMS device
Maggiolino, S.
,
Antoniolli, F.
,
Pezzotti, G.
,
Sbaizero, O.
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 840 KB
Your tags:
english, 2013
3
Controllable fabrication and electromechanical characterization of electrophoresis assembled single-walled carbon nanotube-polymer film transducers
Zhang, Dongzhi
,
Cui, Tianhong
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 717 KB
Your tags:
english, 2013
4
Enhanced electromigration reliability via Ag nanoparticles modified eutectic Sn–58Bi solder joint
Ismathullakhan, Shafiq
,
Lau, Hungyin
,
Chan, Yan-cheong
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 1.18 MB
Your tags:
english, 2013
5
Integrated microfluidic drug delivery devices: a component view
Mst. Fateha Samad, Abbas Z. Kouzani
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 972 KB
Your tags:
english, 2013
6
Process variability in surface roughening of SU-8 by oxygen plasma
Nagaraju Oruganti, Michel Goedert, Sang-Joon John Lee
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 644 KB
Your tags:
english, 2013
7
Design and FEM simulation study of the electro-thermal excitation resonant beam with slit-structure
Huichao Shi, Shangchun Fan, Weiwei Xing, Cheng Li, Jinhao Sun…
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 553 KB
Your tags:
english, 2013
8
A micro PDMS flow sensor based on time-of-flight measurement for conductive liquid
Haixia Yu, Dachao Li, Robert C. Roberts, Kexin Xu…
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 417 KB
Your tags:
english, 2013
9
Micro solar energy harvesting using thin film selective absorber coating and thermoelectric generators
Emmanuel Ogbonnaya, Alfred Gunasekaran, Leland Weiss
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 654 KB
Your tags:
english, 2013
10
MEMS tri-axial force sensor with an integrated mechanical stopper for guidewire applications
Woo-Tae Park, Rama Krishna Kotlanka, Liang Lou…
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 1005 KB
Your tags:
english, 2013
11
A novel approach to realize the local precise variotherm process in micro injection molding
Lei Xie, Thalke Niesel, Monika Leester-Schädel…
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 705 KB
Your tags:
english, 2013
12
Single-step UV diffraction lithography to define a hydrophobic SU-8 interconnected hoodoo structure
Seungha Lee, Gi Seok Jeong, Junghyun Kim, Junghyo Yoon…
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 736 KB
Your tags:
english, 2013
13
A high-efficiency three-dimensional helical micromixer in fused silica
Keyin Liu, Qing Yang, Shengguan He, Feng Chen, Yulong Zhao…
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 719 KB
Your tags:
english, 2013
14
Fabrication of curved sub-micron Si structures by a combination of anisotropic etching using surfactant-added TMAH solution and FIB direct-drawn mask
Hiroshi Tanaka, Hirotaka Hida, Kazuo Sato
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 253 KB
Your tags:
english, 2013
15
A novel fabrication method based on an after thermal oxidation process for the realization of silicon-beams with normative polygon cross sections shapes
Dingbang Xiao, Xinghua Wang, Zelong Zhou, Xuezhong Wu…
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 379 KB
Your tags:
english, 2013
16
Precise analytical evaluation of the ring shape anchored contour mode disk resonator for constructing a low noise UHF Pierce oscillator
Masoud Baghelani, Habib Badri Ghavifekr, Afshin Ebrahimi
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 467 KB
Your tags:
english, 2013
17
Fabrication of micro-trench structures with high aspect ratio based on DRIE process for MEMS device applications
Maoxiang Guo, Xiujian Chou, Jiliang Mu, Bing Liu, Jijun Xiong
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 789 KB
Your tags:
english, 2013
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