Single-step UV diffraction lithography to define a...

Microsystem Technologies 2013 / 07 Vol. 19; Iss. 7

Single-step UV diffraction lithography to define a hydrophobic SU-8 interconnected hoodoo structure

Seungha Lee, Gi Seok Jeong, Junghyun Kim, Junghyo Yoon…
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Volume:
19
Language:
english
DOI:
10.1007/s00542-012-1693-8
Date:
July, 2013
File:
PDF, 736 KB
english, 2013
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