Fabrication of micro-trench structures with high aspect...

Microsystem Technologies 2013 / 07 Vol. 19; Iss. 7

Fabrication of micro-trench structures with high aspect ratio based on DRIE process for MEMS device applications

Maoxiang Guo, Xiujian Chou, Jiliang Mu, Bing Liu, Jijun Xiong
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Volume:
19
Language:
english
DOI:
10.1007/s00542-012-1720-9
Date:
July, 2013
File:
PDF, 789 KB
english, 2013
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