Manufacture of a micro-sized piezoelectric ceramic...

Microsystem Technologies 2013 / 03 Vol. 19; Iss. 3

Manufacture of a micro-sized piezoelectric ceramic structure using a sacrificial polymer mold insert

Jong Hyun Kim, Si-Young Choi, Jae-Ho Jeon, Geunbae Lim…
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Volume:
19
Language:
english
DOI:
10.1007/s00542-012-1590-1
Date:
March, 2013
File:
PDF, 800 KB
english, 2013
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