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Volume 19; Issue 3
Main
Microsystem Technologies
Volume 19; Issue 3
Microsystem Technologies
Volume 19; Issue 3
1
Fabrication of glass-like carbon molds to imprint on glass materials by MEMS processing technologies
Mekaru, Harutaka
,
Okuyama, Chieko
,
Ueno, Akihisa
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 680 KB
Your tags:
english, 2013
2
Transparent thin thermoplastic biochip by injection-moulding and laser transmission welding
Singh, Akanksha
,
Pfleging, Wilhelm
,
Beiser, Markus
,
Malek, Chantal Khan
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 543 KB
Your tags:
english, 2013
3
A magnetic nano-composite soft polymeric membrane
Singh, Akanksha
,
Shirolkar, Mandar
,
Limaye, Mukta V.
,
Gokhale, Shubha
,
Khan-Malek, Chantal
,
Kulkarni, Sulabha K.
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 564 KB
Your tags:
english, 2013
4
Vertical Si nanowire with ultra-high-aspect-ratio by combined top-down processing technique
Nakamura, Jun
,
Higuchi, Kohei
,
Maenaka, Kazusuke
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 908 KB
Your tags:
english, 2013
5
Special issue of the 9th high-aspect-ratio micro-structure technology workshop, HARMST 2011, in Hsinchu, Taiwan, June 12–18, 2011
Chien-Chung Fu, Bernd Michel
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 92 KB
Your tags:
english, 2013
6
Application of photo-etching of polytetrafluoroethylene induced by high energy synchrotron radiation to LIGA
Hideki Kido, Tomoyuki Kuroki, Masaaki Okubo, Yuichi Utsumi
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 694 KB
Your tags:
english, 2013
7
Fabrication of high precision microstructure using ICP etching for capacitive inclination sensor
Daiji Noda, Yuu Kuboyama, Tadashi Hattori
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 599 KB
Your tags:
english, 2013
8
Effect of buffer materials on thermal imprint on plastic optical fiber
Harutaka Mekaru, Akihiro Ohtomo, Hideki Takagi
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 864 KB
Your tags:
english, 2013
9
3D deep X-ray lithography for producing a multi-channel Fourier transform interferometer
Sascha P. Heussler, Herbert O. Moser, S. M. P. Kalaiselvi
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 613 KB
Your tags:
english, 2013
10
Manufacture of a micro-sized piezoelectric ceramic structure using a sacrificial polymer mold insert
Jong Hyun Kim, Si-Young Choi, Jae-Ho Jeon, Geunbae Lim…
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 800 KB
Your tags:
english, 2013
11
Fabrication of 3-D PTFE microstructures utilising change of etching rate with respect to exposure time
Mitsuhiro Horade, Susumu Sugiyama
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 529 KB
Your tags:
english, 2013
12
Influence of developer temperature on the shape of structures fabricated by deep X-ray lithography
Mitsuhiro Horade, Susumu Sugiyama
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 553 KB
Your tags:
english, 2013
13
Deposition property investigation of a focused ion beam for a high-aspect-ratio metal tip
Dae Keun Choi, Sang Hoon Lee
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 829 KB
Your tags:
english, 2013
14
Obstacles for cognitive analogy in analysis and synthesis in microsystems development
Albert Albers, Peter Börsting, Sven Matthiesen
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 576 KB
Your tags:
english, 2013
15
Numerical simulation of the capillary flow in the meander microchannel
C. C. Lai, C. K. Chung
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 742 KB
Your tags:
english, 2013
16
On characteristics of pore size distribution in hybrid pulse anodized high-aspect-ratio aluminum oxide with Taguchi method
C. K. Chung, M. W. Liao, H. C. Chang, W. T. Chang, T. Y. Liu
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 632 KB
Your tags:
english, 2013
17
Ensuring functional reliability of molded micro components
Albert Albers, Tarak Turki, Philipp Hoppen
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 455 KB
Your tags:
english, 2013
18
A novel fast and low cost replication technology for high-aspect-ratio magnetic microstructures
Xuhan Dai, Xiaodan Miao, Guocheng Shao, Wanjun Wang
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 464 KB
Your tags:
english, 2013
19
BPN a new thick negative photoresist with high aspect ratio for MEMS applications
D. Bourrier, M. Dilhan, A. Ghannam, L. Ourak, H. Granier
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 405 KB
Your tags:
english, 2013
20
High aspect ratio metal micro and nano pillars for minimal footprint MEMS suspension
Felix Greiner, Helmut F. Schlaak
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 639 KB
Your tags:
english, 2013
21
Fabrication of flexible light guide plate using CO2laser LIGA-like technology
C. K. Chung, Y. J. Syu, H. Y. Wang, C. C. Cheng, S. L. Lin…
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 410 KB
Your tags:
english, 2013
22
Metal deposition on flexible membrane through the combination of localized electrochemical deposition and electroless plating
Meng-Chi Huang, Tein-Li Chang, Tune-Hune Kao, Chien-Chung Fu
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 450 KB
Your tags:
english, 2013
23
Application of the inclined exposure and molding process to fabricate a micro beam-splitter with nanometer roughness
Yun-Ju Chuang, Shih-Hao Huang, Ying-Chuan Chen, Kuo-Yung Hung
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 885 KB
Your tags:
english, 2013
24
Supporting design of primary shaped micro parts and systems through provision of experience
Albert Albers, Tarak Turki
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 402 KB
Your tags:
english, 2013
25
Fabrication of two dimensional high aspect ratio polymer photonic crystal laser
Jie Zhou, Gang Liu, Xiaobo Zhang, Xueliang Kang, Ying Xiong…
Journal:
Microsystem Technologies
Year:
2013
Language:
english
File:
PDF, 469 KB
Your tags:
english, 2013
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