Volume 19; Issue 3

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Microsystem Technologies
Volume 19; Issue 3

Microsystem Technologies

Volume 19; Issue 3

1

Fabrication of glass-like carbon molds to imprint on glass materials by MEMS processing technologies

Mekaru, Harutaka, Okuyama, Chieko, Ueno, Akihisa

Journal:

Microsystem Technologies

Year:

2013

Language:

english

File:

PDF, 680 KB

english, 2013

2

Transparent thin thermoplastic biochip by injection-moulding and laser transmission welding

Singh, Akanksha, Pfleging, Wilhelm, Beiser, Markus, Malek, Chantal Khan

Journal:

Microsystem Technologies

Year:

2013

Language:

english

File:

PDF, 543 KB

english, 2013

3

A magnetic nano-composite soft polymeric membrane

Singh, Akanksha, Shirolkar, Mandar, Limaye, Mukta V., Gokhale, Shubha, Khan-Malek, Chantal, Kulkarni, Sulabha K.

Journal:

Microsystem Technologies

Year:

2013

Language:

english

File:

PDF, 564 KB

english, 2013

4

Vertical Si nanowire with ultra-high-aspect-ratio by combined top-down processing technique

Nakamura, Jun, Higuchi, Kohei, Maenaka, Kazusuke

Journal:

Microsystem Technologies

Year:

2013

Language:

english

File:

PDF, 908 KB

english, 2013

5

Special issue of the 9th high-aspect-ratio micro-structure technology workshop, HARMST 2011, in Hsinchu, Taiwan, June 12–18, 2011

Chien-Chung Fu, Bernd Michel

Journal:

Microsystem Technologies

Year:

2013

Language:

english

File:

PDF, 92 KB

english, 2013

6

Application of photo-etching of polytetrafluoroethylene induced by high energy synchrotron radiation to LIGA

Hideki Kido, Tomoyuki Kuroki, Masaaki Okubo, Yuichi Utsumi

Journal:

Microsystem Technologies

Year:

2013

Language:

english

File:

PDF, 694 KB

english, 2013

7

Fabrication of high precision microstructure using ICP etching for capacitive inclination sensor

Daiji Noda, Yuu Kuboyama, Tadashi Hattori

Journal:

Microsystem Technologies

Year:

2013

Language:

english

File:

PDF, 599 KB

english, 2013

8

Effect of buffer materials on thermal imprint on plastic optical fiber

Harutaka Mekaru, Akihiro Ohtomo, Hideki Takagi

Journal:

Microsystem Technologies

Year:

2013

Language:

english

File:

PDF, 864 KB

english, 2013

9

3D deep X-ray lithography for producing a multi-channel Fourier transform interferometer

Sascha P. Heussler, Herbert O. Moser, S. M. P. Kalaiselvi

Journal:

Microsystem Technologies

Year:

2013

Language:

english

File:

PDF, 613 KB

english, 2013

10

Manufacture of a micro-sized piezoelectric ceramic structure using a sacrificial polymer mold insert

Jong Hyun Kim, Si-Young Choi, Jae-Ho Jeon, Geunbae Lim…

Journal:

Microsystem Technologies

Year:

2013

Language:

english

File:

PDF, 800 KB

english, 2013

11

Fabrication of 3-D PTFE microstructures utilising change of etching rate with respect to exposure time

Mitsuhiro Horade, Susumu Sugiyama

Journal:

Microsystem Technologies

Year:

2013

Language:

english

File:

PDF, 529 KB

english, 2013

12

Influence of developer temperature on the shape of structures fabricated by deep X-ray lithography

Mitsuhiro Horade, Susumu Sugiyama

Journal:

Microsystem Technologies

Year:

2013

Language:

english

File:

PDF, 553 KB

english, 2013

13

Deposition property investigation of a focused ion beam for a high-aspect-ratio metal tip

Dae Keun Choi, Sang Hoon Lee

Journal:

Microsystem Technologies

Year:

2013

Language:

english

File:

PDF, 829 KB

english, 2013

14

Obstacles for cognitive analogy in analysis and synthesis in microsystems development

Albert Albers, Peter Börsting, Sven Matthiesen

Journal:

Microsystem Technologies

Year:

2013

Language:

english

File:

PDF, 576 KB

english, 2013

15

Numerical simulation of the capillary flow in the meander microchannel

C. C. Lai, C. K. Chung

Journal:

Microsystem Technologies

Year:

2013

Language:

english

File:

PDF, 742 KB

english, 2013

16

On characteristics of pore size distribution in hybrid pulse anodized high-aspect-ratio aluminum oxide with Taguchi method

C. K. Chung, M. W. Liao, H. C. Chang, W. T. Chang, T. Y. Liu

Journal:

Microsystem Technologies

Year:

2013

Language:

english

File:

PDF, 632 KB

english, 2013

17

Ensuring functional reliability of molded micro components

Albert Albers, Tarak Turki, Philipp Hoppen

Journal:

Microsystem Technologies

Year:

2013

Language:

english

File:

PDF, 455 KB

english, 2013

18

A novel fast and low cost replication technology for high-aspect-ratio magnetic microstructures

Xuhan Dai, Xiaodan Miao, Guocheng Shao, Wanjun Wang

Journal:

Microsystem Technologies

Year:

2013

Language:

english

File:

PDF, 464 KB

english, 2013

19

BPN a new thick negative photoresist with high aspect ratio for MEMS applications

D. Bourrier, M. Dilhan, A. Ghannam, L. Ourak, H. Granier

Journal:

Microsystem Technologies

Year:

2013

Language:

english

File:

PDF, 405 KB

english, 2013

20

High aspect ratio metal micro and nano pillars for minimal footprint MEMS suspension

Felix Greiner, Helmut F. Schlaak

Journal:

Microsystem Technologies

Year:

2013

Language:

english

File:

PDF, 639 KB

english, 2013

21

Fabrication of flexible light guide plate using CO2laser LIGA-like technology

C. K. Chung, Y. J. Syu, H. Y. Wang, C. C. Cheng, S. L. Lin…

Journal:

Microsystem Technologies

Year:

2013

Language:

english

File:

PDF, 410 KB

english, 2013

22

Metal deposition on flexible membrane through the combination of localized electrochemical deposition and electroless plating

Meng-Chi Huang, Tein-Li Chang, Tune-Hune Kao, Chien-Chung Fu

Journal:

Microsystem Technologies

Year:

2013

Language:

english

File:

PDF, 450 KB

english, 2013

23

Application of the inclined exposure and molding process to fabricate a micro beam-splitter with nanometer roughness

Yun-Ju Chuang, Shih-Hao Huang, Ying-Chuan Chen, Kuo-Yung Hung

Journal:

Microsystem Technologies

Year:

2013

Language:

english

File:

PDF, 885 KB

english, 2013

24

Supporting design of primary shaped micro parts and systems through provision of experience

Albert Albers, Tarak Turki

Journal:

Microsystem Technologies

Year:

2013

Language:

english

File:

PDF, 402 KB

english, 2013

25

Fabrication of two dimensional high aspect ratio polymer photonic crystal laser

Jie Zhou, Gang Liu, Xiaobo Zhang, Xueliang Kang, Ying Xiong…

Journal:

Microsystem Technologies

Year:

2013

Language:

english

File:

PDF, 469 KB

english, 2013