A membrane micropump electrostatically actuated across the working fluid
(Prochaska), Andrew Machauf, Nemirovsky, Yael, Dinnar, UriVolume:
15
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/15/12/013
Date:
December, 2005
File:
PDF, 1.22 MB
english, 2005