Volume 15; Issue 12

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Journal of Micromechanics and Microengineering
Volume 15; Issue 12

Journal of Micromechanics and Microengineering

Volume 15; Issue 12

1

Impact of polymer film thickness and cavity size on polymer flow during embossing: toward process design rules for nanoimprint lithography

Rowland, Harry D, Sun, Amy C, Schunk, P Randy, King, William P

Journal:

Journal of Micromechanics and Microengineering

Year:

2005

Language:

english

File:

PDF, 1.80 MB

english, 2005

2

A membrane micropump electrostatically actuated across the working fluid

(Prochaska), Andrew Machauf, Nemirovsky, Yael, Dinnar, Uri

Journal:

Journal of Micromechanics and Microengineering

Year:

2005

Language:

english

File:

PDF, 1.22 MB

english, 2005

3

Characterization of the surface tension and viscosity effects on the formation of nano-liter droplet arrays by an instant protein micro stamper

Ho, Cheng-En, Tseng, Fan-Gang, Lin, Shih-Chang, Su, Chiun-Jie, Liu, Zheng-Yan, Yu, Ru-Ji, Chen, Yu-Feng, Huang, Haimei, Chieng, Ching-Chang

Journal:

Journal of Micromechanics and Microengineering

Year:

2005

Language:

english

File:

PDF, 835 KB

english, 2005

4

A maskless post-CMOS bulk micromachining process and its application

Dai, Ching-Liang, Chiou, Jing-Hung, Lu, Michael Shiang-Cheng

Journal:

Journal of Micromechanics and Microengineering

Year:

2005

Language:

english

File:

PDF, 886 KB

english, 2005

5

Optimal design of a micromachined force gauge under uncertainty

Mawardi, A, Pitchumani, R

Journal:

Journal of Micromechanics and Microengineering

Year:

2005

Language:

english

File:

PDF, 301 KB

english, 2005

6

Effect of gold coating on the Q -factor of a resonant cantilever

Sandberg, R, Mølhave, K, Boisen, A, Svendsen, W

Journal:

Journal of Micromechanics and Microengineering

Year:

2005

Language:

english

File:

PDF, 120 KB

english, 2005

7

Low-thermal-budget and selective relaxation of stress gradients in gold micro-cantilever beams using ion implantation

Kang, T J, Kim, J G, Lee, J S, Lee, J H, Hahn, J H, Lee, H Y, Kim, Y H

Journal:

Journal of Micromechanics and Microengineering

Year:

2005

Language:

english

File:

PDF, 2.16 MB

english, 2005

8

Analysis of thermoelastic damping in laminated composite micromechanical beam resonators

Vengallatore, Srikar

Journal:

Journal of Micromechanics and Microengineering

Year:

2005

Language:

english

File:

PDF, 665 KB

english, 2005

9

Interface control of pressure-driven two-fluid flow in microchannels using electroosmosis

Wang, Cheng, Gao, Yandong, Nguyen, Nam-Trung, Wong, Teck Neng, Yang, Chun, Ooi, Kim Tiow

Journal:

Journal of Micromechanics and Microengineering

Year:

2005

Language:

english

File:

PDF, 905 KB

english, 2005

10

Single mode solid state distributed feedback dye laser fabricated by gray scale electron beam lithography on a dye doped SU-8 resist

Balslev, S, Rasmussen, T, Shi, P, Kristensen, A

Journal:

Journal of Micromechanics and Microengineering

Year:

2005

Language:

english

File:

PDF, 238 KB

english, 2005

11

Thermocapillary control of microfluidic transport with a stationary cyclic heat source

Glockner, P S, Naterer, G F

Journal:

Journal of Micromechanics and Microengineering

Year:

2005

Language:

english

File:

PDF, 676 KB

english, 2005

12

Generic technological platform for microfabricating silicon nitride micro- and nanopipette arrays

Guenat, O T, Generelli, S, Dadras, M, Berdondini, L, Rooij, N F de, Koudelka-Hep, M

Journal:

Journal of Micromechanics and Microengineering

Year:

2005

Language:

english

File:

PDF, 276 KB

english, 2005

13

Development of a monolithic total internal reflection-based biochip utilizing a microprism array for fluorescence sensing

Huang, Shih-Hao, Tseng, Fan-Gang

Journal:

Journal of Micromechanics and Microengineering

Year:

2005

Language:

english

File:

PDF, 1.19 MB

english, 2005

14

Single crystal 6H-SiC MEMS fabrication based on smart-cut technique

Cong, Peng, Young, Darrin J

Journal:

Journal of Micromechanics and Microengineering

Year:

2005

Language:

english

File:

PDF, 1.46 MB

english, 2005

15

Steady-state 1D electrothermal modeling of an electrothermal transducer

Todd, Shane T, Xie, Huikai

Journal:

Journal of Micromechanics and Microengineering

Year:

2005

Language:

english

File:

PDF, 606 KB

english, 2005

16

Fabrication of micrometer Ni columns by continuous and intermittent microanode guided electroplating

Lin, J C, Jang, S B, Lee, D L, Chen, C C, Yeh, P C, Chang, T K, Yang, J H

Journal:

Journal of Micromechanics and Microengineering

Year:

2005

Language:

english

File:

PDF, 894 KB

english, 2005

17

Microsensor concept based on interfacial liquid–liquid microwave flow in a microfluidic channel

Allievi, Alejandro

Journal:

Journal of Micromechanics and Microengineering

Year:

2005

Language:

english

File:

PDF, 405 KB

english, 2005

18

Miniaturization of pinch-type valves and pumps for practical micro total analysis system integration

Oh, Kwang W, Rong, Rong, Ahn, Chong H

Journal:

Journal of Micromechanics and Microengineering

Year:

2005

Language:

english

File:

PDF, 936 KB

english, 2005

19

Electrochemical printing: in situ characterization using an electrochemical quartz crystal microbalance

Nelson, Jeffrey B, Schwartz, Daniel T

Journal:

Journal of Micromechanics and Microengineering

Year:

2005

Language:

english

File:

PDF, 368 KB

english, 2005