Fabrication of antireflection structure with antifouling-effect surface by ultraviolet nanoimprint lithography
Yajima, Keita, Adachi, Kaoru, Tsukahara, Yasuhisa, Taniguchi, JunVolume:
110
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.03.104
Date:
October, 2013
File:
PDF, 1.16 MB
english, 2013