Fabrication of antireflection structure with...

Fabrication of antireflection structure with antifouling-effect surface by ultraviolet nanoimprint lithography

Yajima, Keita, Adachi, Kaoru, Tsukahara, Yasuhisa, Taniguchi, Jun
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Volume:
110
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.03.104
Date:
October, 2013
File:
PDF, 1.16 MB
english, 2013
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