A Curved-Beam Bistable Mechanism

Qiu, J., Lang, J.H., Slocum, A.H.

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Volume:

Language:

english

Journal:

Journal of Microelectromechanical Systems

DOI:

10.1109/JMEMS.2004.825308

Date:

April, 2004

File:

PDF, 359 KB

english, 2004

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