Volume 13; Issue 2

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Journal of Microelectromechanical Systems
Volume 13; Issue 2

Journal of Microelectromechanical Systems

Volume 13; Issue 2

1

Application of a multilayered magnetostrictive film to a micromachined 2-D optical scanner

Debray, A., Ludwig, A., Bourouina, T., Asaoka, A., Tiercelin, N., Reyne, G., Oki, T., Quandt, E., Muro, H., Fujita, H.

Journal:

Journal of Microelectromechanical Systems

Year:

2004

Language:

english

File:

PDF, 508 KB

english, 2004

2

MEMS-based solid propellant microthruster design, simulation, fabrication, and testing

Kaili Zhang, Chou, S.K., Ang, S.S.

Journal:

Journal of Microelectromechanical Systems

Year:

2004

Language:

english

File:

PDF, 732 KB

english, 2004

3

A Low-Temperature Thin-Film Electroplated Metal Vacuum Package

Stark, B.H., Najafi, K.

Journal:

Journal of Microelectromechanical Systems

Year:

2004

Language:

english

File:

PDF, 1.04 MB

english, 2004

4

Cross-Coupling Errors of Micromachined Gyroscopes

Kanso, E., Szeri, A.J., Pisano, A.P.

Journal:

Journal of Microelectromechanical Systems

Year:

2004

Language:

english

File:

PDF, 786 KB

english, 2004

5

The Electromechanical Response of Multilayered Piezoelectric Structures

Elka, E., Elata, D., Abramovich, H.

Journal:

Journal of Microelectromechanical Systems

Year:

2004

Language:

english

File:

PDF, 346 KB

english, 2004

6

Anelasticity and Damping of Thin Aluminum Films on Silicon Substrates

Choi, D., Kim, H., Nix, W.D.

Journal:

Journal of Microelectromechanical Systems

Year:

2004

Language:

english

File:

PDF, 289 KB

english, 2004

7

Low-Voltage, Large-Scan Angle MEMS Analog Micromirror Arrays With Hidden Vertical Comb-Drive Actuators

Hah, D., Huang, S.T.-Y., Tsai, J.-C., Toshiyoshi, H., Wu, M.C.

Journal:

Journal of Microelectromechanical Systems

Year:

2004

Language:

english

File:

PDF, 807 KB

english, 2004

8

Analysis and Analytical Modeling of Static Pull-In With Application to MEMS-Based Voltage Reference and Process Monitoring

Rocha, L.A., Cretu, E., Wolffenbuttel, R.F.

Journal:

Journal of Microelectromechanical Systems

Year:

2004

Language:

english

File:

PDF, 847 KB

english, 2004

9

A Curved-Beam Bistable Mechanism

Qiu, J., Lang, J.H., Slocum, A.H.

Journal:

Journal of Microelectromechanical Systems

Year:

2004

Language:

english

File:

PDF, 359 KB

english, 2004

10

A 2-D Microcantilever Array for Multiplexed Biomolecular Analysis

Yue, M., Lin, H., Dedrick, D.E., Satyanarayana, S., Majumdar, A., Bedekar, A.S., Jenkins, J.W., Sundaram, S.

Journal:

Journal of Microelectromechanical Systems

Year:

2004

Language:

english

File:

PDF, 604 KB

english, 2004

11

A Self-Acting Gas Thrust Bearing for High-Speed Microrotors

Wong, C.W., Zhang, X., Jacobson, S.A., Epstein, A.H.

Journal:

Journal of Microelectromechanical Systems

Year:

2004

Language:

english

File:

PDF, 658 KB

english, 2004

12

BESOI-Based Integrated Optical Silicon Accelerometer

J. Plaza, A. Llobera, C. Dominguez, J. Esteve, I. Salinas, J. Garcia, J. Berganzo

Journal:

Journal of Microelectromechanical Systems

Year:

2004

Language:

english

File:

PDF, 657 KB

english, 2004

13

Computational Study of Band-Crossing Reactions

A. Matta, O. Knio, R. Ghanem, C. Chen, J. Santiago, B. Debusschere, H. Najm

Journal:

Journal of Microelectromechanical Systems

Year:

2004

Language:

english

File:

PDF, 392 KB

english, 2004

14

High-Fidelity Modeling of MEMS Resonators—Part I: Anchor Loss Mechanisms Through Substrate

Park, Y.-H., Park, K.C.

Journal:

Journal of Microelectromechanical Systems

Year:

2004

Language:

english

File:

PDF, 416 KB

english, 2004

15

Microassembly of 3-D Microstructures Using a Compliant, Passive Microgripper

Dechev, N., Cleghorn, W.L., Mills, J.K.

Journal:

Journal of Microelectromechanical Systems

Year:

2004

Language:

english

File:

PDF, 1.24 MB

english, 2004

16

A Micromachined 2<tex>$times$</tex>2 Optical Switch Aligned With Bevel-Ended Fibers for Low Return Loss

Kwon, H.N., Lee, J.-H.

Journal:

Journal of Microelectromechanical Systems

Year:

2004

Language:

english

File:

PDF, 415 KB

english, 2004

17

Self-Aligning MEMS In-Line Separable Electrical Connector

Larsson, M.P., Syms, R.R.A.

Journal:

Journal of Microelectromechanical Systems

Year:

2004

Language:

english

File:

PDF, 860 KB

english, 2004

18

Scaling Laws for Opening Partially Adhered Contacts in MEMS

Decuzzi, P., Srolovitz, D.J.

Journal:

Journal of Microelectromechanical Systems

Year:

2004

Language:

english

File:

PDF, 314 KB

english, 2004

19

High-Performance Inductors Using Capillary Based Fluidic Self-Assembly

Scott, K.L., Hirano, T., Yang, H., Singh, H., Howe, R.T., Niknejad, A.M.

Journal:

Journal of Microelectromechanical Systems

Year:

2004

Language:

english

File:

PDF, 953 KB

english, 2004

20

Errata to “A Microfabricated Electrochemical Oxygen Generator for High-Density Cell Culture Arrays”

Marharbiz, M.M., Holz, W.J., Sharifzadeh, S., Keasling, J.D., Howe, R.T.

Journal:

Journal of Microelectromechanical Systems

Year:

2004

Language:

english

File:

PDF, 85 KB

english, 2004

21

Mechanical Characterization of Polysilicon Through On-Chip Tensile Tests

Corigliano, A., DeMasi, B., Frangi, A., Comi, C., Villa, A., Marchi, M.

Journal:

Journal of Microelectromechanical Systems

Year:

2004

Language:

english

File:

PDF, 1.59 MB

english, 2004