Spokes and charged particle transport in HiPIMS magnetrons

Journal of Physics D Applied Physics 2013 / 02 Vol. 46; Iss. 8

Spokes and charged particle transport in HiPIMS magnetrons

Brenning, N, Lundin, D, Minea, T, Costin, C, Vitelaru, C
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Volume:
46
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/46/8/084005
Date:
February, 2013
File:
PDF, 632 KB
english, 2013
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