Volume 46; Issue 8

Journal of Physics D Applied Physics

Volume 46; Issue 8

1

Ion energy distribution functions behind the sheaths of magnetized and non-magnetized radio frequency discharges

Trieschmann, Jan, Shihab, Mohammed, Szeremley, Daniel, Elgendy, Abd Elfattah, Gallian, Sara, Eremin, Denis, Brinkmann, Ralf Peter, Mussenbrock, Thomas

Journal:

Journal of Physics D Applied Physics

Year:

2013

Language:

english

File:

PDF, 1.02 MB

english, 2013

2

Formation of crystalline γ -Al 2 O 3 induced by variable substrate biasing during reactive magnetron sputtering

Prenzel, M, Kortmann, A, von Keudell, A, Nahif, F, Schneider, J M, Shihab, M, Brinkmann, R P

Journal:

Journal of Physics D Applied Physics

Year:

2013

Language:

english

File:

PDF, 380 KB

english, 2013

3

Simulations of electromagnetic effects in high-frequency capacitively coupled discharges using the Darwin approximation

Eremin, Denis, Hemke, Torben, Brinkmann, Ralf Peter, Mussenbrock, Thomas

Journal:

Journal of Physics D Applied Physics

Year:

2013

Language:

english

File:

PDF, 276 KB

english, 2013

4

Pulsed high-power plasmas for deposition of nanostructured thin films

Awakowicz, Peter, Czarnetzki, Uwe

Journal:

Journal of Physics D Applied Physics

Year:

2013

Language:

english

File:

PDF, 218 KB

english, 2013

5

Improving the stability of atomic layer deposited alumina films in aqueous environments with metal oxide capping layers

Bulusu, A, Kim, H, Samet, D, Graham, S

Journal:

Journal of Physics D Applied Physics

Year:

2013

Language:

english

File:

PDF, 1.42 MB

english, 2013

6

Target implantation and redeposition processes during high-power impulse magnetron sputtering of aluminum

Will, Andreas, de los Arcos, Teresa, Corbella, Carles, Hecimovic, Ante, Machura, Patrick D, Winter, Jörg, von Keudell, Achim

Journal:

Journal of Physics D Applied Physics

Year:

2013

Language:

english

File:

PDF, 356 KB

english, 2013

7

Spokes and charged particle transport in HiPIMS magnetrons

Brenning, N, Lundin, D, Minea, T, Costin, C, Vitelaru, C

Journal:

Journal of Physics D Applied Physics

Year:

2013

Language:

english

File:

PDF, 632 KB

english, 2013

8

Anatase and rutile TiO 2 films deposited by arc-free deep oscillation magnetron sputtering

Lin, Jianliang, Wang, Bo, Sproul, William D, Ou, Yixiang, Dahan, Isaac

Journal:

Journal of Physics D Applied Physics

Year:

2013

Language:

english

File:

PDF, 1.57 MB

english, 2013

9

Multiple frequency capacitively coupled plasmas as a new technology for sputter processes

Bienholz, S, Bibinov, N, Awakowicz, P

Journal:

Journal of Physics D Applied Physics

Year:

2013

Language:

english

File:

PDF, 368 KB

english, 2013

10

Instabilities in high-power impulse magnetron plasmas: from stochasticity to periodicity

Winter, J, Hecimovic, A, de los Arcos, T, Böke, M, Schulz-von der Gathen, V

Journal:

Journal of Physics D Applied Physics

Year:

2013

Language:

english

File:

PDF, 1.27 MB

english, 2013

11

Synthesis of nano-structured HPPMS CrN/AlN coatings

Bagcivan, N, Bobzin, K, Theiß, S

Journal:

Journal of Physics D Applied Physics

Year:

2013

Language:

english

File:

PDF, 1.40 MB

english, 2013

12

Flow curve determination on dc-MS and HPPMS CrAlN coatings

Bobzin, K, Bagcivan, N, Theiß, S, Perne, J

Journal:

Journal of Physics D Applied Physics

Year:

2013

Language:

english

File:

PDF, 595 KB

english, 2013

13

Surface chemistry of TiAlN and TiAlNO coatings deposited by means of high power pulsed magnetron sputtering

Gnoth, C, Kunze, C, Hans, M, to Baben, M, Emmerlich, J, Schneider, J M, Grundmeier, G

Journal:

Journal of Physics D Applied Physics

Year:

2013

Language:

english

File:

PDF, 975 KB

english, 2013

14

Time- and space-resolved high-throughput characterization of stresses during sputtering and thermal processing of Al–Cr–N thin films

Grochla, D, Siegel, A, Hamann, S, Buenconsejo, P J S, Kieschnick, M, Brunken, H, König, D, Ludwig, A

Journal:

Journal of Physics D Applied Physics

Year:

2013

Language:

english

File:

PDF, 2.07 MB

english, 2013

15

Silicon oxide barrier films deposited on PET foils in pulsed plasmas: influence of substrate bias on deposition process and film properties

Steves, S, Ozkaya, B, Liu, C-N, Ozcan, O, Bibinov, N, Grundmeier, G, Awakowicz, P

Journal:

Journal of Physics D Applied Physics

Year:

2013

Language:

english

File:

PDF, 590 KB

english, 2013

16

Surface pre-treatment for barrier coatings on polyethylene terephthalate

Bahre, H, Bahroun, K, Behm, H, Steves, S, Awakowicz, P, Böke, M, Hopmann, Ch, Winter, J

Journal:

Journal of Physics D Applied Physics

Year:

2013

Language:

english

File:

PDF, 4.02 MB

english, 2013

17

Phase stability and elastic properties of titanium aluminum oxynitride studied by ab initio calculations

Baben, Moritz to, Raumann, Leonard, Schneider, Jochen M

Journal:

Journal of Physics D Applied Physics

Year:

2013

Language:

english

File:

PDF, 670 KB

english, 2013

18

Combined in situ FTIR-spectroscopic and electrochemical analysis of nanopores in ultra-thin SiO x -like plasma polymer barrier films

Liu, C-N, Ozkaya, B, Steves, S, Awakowicz, P, Grundmeier, G

Journal:

Journal of Physics D Applied Physics

Year:

2013

Language:

english

File:

PDF, 1.01 MB

english, 2013