Interactions Between Line Edge Roughness and Random Dopant...

Interactions Between Line Edge Roughness and Random Dopant Fluctuation in Nonplanar Field-Effect Transistor Variability

Leung, Greg, Chui, Chi On
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Volume:
60
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2013.2276072
Date:
October, 2013
File:
PDF, 2.58 MB
english, 2013
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