Plasma-Enhanced Atomic Layer Deposition of AlN Epitaxial Thin Film for AlN/GaN Heterostructure TFTs
Liu, Cheng, Liu, Shenghou, Huang, Sen, Chen, Kevin J.Volume:
34
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2013.2271973
Date:
September, 2013
File:
PDF, 580 KB
english, 2013