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High-Rate Sputtering with Electron Cyclotron Resonance and Electric-Mirror Excitation
Matsuoka, MasayaVolume:
140-142
Year:
1993
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.140-142.55
File:
PDF, 1.57 MB
english, 1993