Improved depth resolution of secondary ion mass spectrometry profiles in diamond: A quantitative analysis of the delta-doping
Fiori, Alexandre, Jomard, François, Teraji, Tokuyuki, Chicot, Gauthier, Bustarret, EtienneVolume:
557
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.10.076
Date:
April, 2014
File:
PDF, 911 KB
english, 2014