Volume 557

Thin Solid Films

Volume 557

1

Epitaxial growth of strained and unstrained GeSn alloys up to 25% Sn

Oehme, Michael, Kostecki, Konrad, Schmid, Marc, Oliveira, Filipe, Kasper, Erich, Schulze, Jörg

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1.05 MB

english, 2014

2

Improved depth resolution of secondary ion mass spectrometry profiles in diamond: A quantitative analysis of the delta-doping

Fiori, Alexandre, Jomard, François, Teraji, Tokuyuki, Chicot, Gauthier, Bustarret, Etienne

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 911 KB

english, 2014

3

Reflection high energy electron diffraction studies on SixSnyGe1−x−y on Si(100) molecular beam epitaxial growth

Nikiforov, A.I., Mashanov, V.I., Timofeev, V.A., Pchelyakov, O.P., Cheng, H.-H.

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 395 KB

english, 2014

4

Effect of deposition rate on the characteristics of Ge quantum dots on Si (001) substrates

Gotoh, Kazuhiro, Oshima, Ryuji, Sugaya, Takeyoshi, Sakata, Isao, Matsubara, Koji, Kondo, Michio

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1.25 MB

english, 2014

5

Microdisk enhanced photodetector based on Ge self-assembled quantum dots on silicon-on-insulator

Xu, Xuejun, Chiba, Taichi, Maruizumi, Takuya, Shiraki, Yasuhiro

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 797 KB

english, 2014

6

Influence of Ge substrate orientation on crystalline structures of Ge1−xSnx epitaxial layers

Asano, Takanori, Kidowaki, Shohei, Kurosawa, Masashi, Taoka, Noriyuki, Nakatsuka, Osamu, Zaima, Shigeaki

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 684 KB

english, 2014

7

Nano-scale surface morphology optimization of the ohmic contacts and electrical properties of AlGaN/GaN high electron mobility transistors using a rapid thermal annealing dielectric protection layer

Cho, Sung-Jin, Wang, Cong, Kim, Nam-Young

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1.46 MB

english, 2014

8

SiGeSn growth studies using reduced pressure chemical vapor deposition towards optoelectronic applications

Wirths, S., Buca, D., Ikonic, Z., Harrison, P., Tiedemann, A.T., Holländer, B., Stoica, T., Mussler, G., Breuer, U., Hartmann, J.M., Grützmacher, D., Mantl, S.

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1.66 MB

english, 2014

9

Reduced-pressure chemical vapor deposition of boron-doped Si and Ge layers

Bogumilowicz, Y., Hartmann, J.M.

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 991 KB

english, 2014

10

A study on multiple defect states in low-carbon doped GaN layers and its correlation with AlGaN/GaN high electron mobility transistor operation

Tanaka, Takeshi, Shiojima, Kenji, Otoki, Yohei, Tokuda, Yutaka

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 542 KB

english, 2014

11

Effects of plasma-induced defects on electrical characteristics of AlGaN/GaN heterostructure before and after low-temperature annealing

Takimoto, Takuma, Takeshita, Koji, Nakamura, Seiji, Okumura, Tsugunori

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 591 KB

english, 2014

12

Importance of control of oxidant partial pressure on structural and electrical properties of Pr-oxide films

Kato, Kimihiko, Sakashita, Mitsuo, Takeuchi, Wakana, Taoka, Noriyuki, Nakatsuka, Osamu, Zaima, Shigeaki

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 963 KB

english, 2014

13

Isotopic enrichment of diamond using microwave plasma-assisted chemical vapor deposition with high carbon conversion efficiency

Teraji, Tokuyuki

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 531 KB

english, 2014

14

Conductive and transparent V-doped ZnO thin films grown by radio frequency magnetron sputtering

Okuda, Shuhei, Matsuo, Takuya, Chiba, Hiroshi, Mori, Tatsuya, Washio, Katsuyoshi

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1.71 MB

english, 2014

15

Fabrication of ultra-thin strained silicon on insulator by He implantation and ion cut techniques and characterization

Mu, Z.Q., Xue, Z.Y., Wei, X, Chen, D., Zhang, M., Di, Zengfeng, Wang, X.

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1.18 MB

english, 2014

16

A magnetic tunnel junction with an L21-ordered Co2FeSi electrode formed by all room-temperature fabrication processes

Fujita, Yuichi, Yamada, Shinya, Maeda, Yuya, Miyao, Masanobu, Hamaya, Kohei

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 895 KB

english, 2014

17

Dislocation behavior of surface-oxygen-concentration controlled Si wafers

Asazu, Hirotada, Takeuchi, Shotaro, Sannai, Hiroya, Sudo, Haruo, Araki, Koji, Nakamura, Yoshiaki, Izunome, Koji, Sakai, Akira

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 726 KB

english, 2014

18

High growth rate deposition of phosphorus-doped homoepitaxial (001) diamond films for deep-ultraviolet light emitting device

Maida, Osamu, Tada, Shuhei, Ito, Toshimichi

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 521 KB

english, 2014

19

Improvement of photoluminescence from Ge layer with patterned Si3N4 stressors

Oda, Katsuya, Okumura, Tadashi, Tani, Kazuki, Saito, Shin-ichi, Ido, Tatemi

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1.24 MB

english, 2014

20

Extraction of interface state density at SiO2/SiC interfaces based on impedance measurements with different temperatures

Yoshida, Nozomi, Waki, Eiji, Arai, Manabu, Yamasaki, Kimiyoshi, Han, Jae-Hoon, Takenaka, Mitsuru, Takagi, Shinichi

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 588 KB

english, 2014

21

Epitaxial growth of B-doped Si on Si(100) by electron-cyclotron-resonance Ar plasma chemical vapor deposition in a SiH4–B2H6–H2 gas mixture without substrate heating

Abe, Yusuke, Sakuraba, Masao, Murota, Junichi

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 934 KB

english, 2014

22

Heteroepitaxial growth of Ge on compliant strained nano-structured Si lines and dots on (001) silicon on insulator substrate

Zaumseil, Peter, Yamamoto, Yuji, Schubert, Markus Andreas, Schroeder, Thomas, Tillack, Bernd

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1.11 MB

english, 2014

23

Formation of Ge(111) on Insulator by Ge epitaxy on Si(111) and layer transfer

Sawano, K., Hoshi, Y., Endo, S., Nagashima, T., Arimoto, K., Yamanaka, J., Nakagawa, K., Yamada, S., Hamaya, K., Miyao, M., Shiraki, Y.

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 685 KB

english, 2014

24

Fabrication of an ultra-thin silicon solar cell and nano-scale honeycomb structure by thermal-stress-induced pattern transfer method

Du, Chen-Hsun, Wang, Teng-Yu, Chen, Chien-Hsun, Yeh, J. Andrew

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 978 KB

english, 2014

25

Epitaxial formation and electrical properties of Ni germanide/Ge(110) contacts

Deng, Yunsheng, Nakatsuka, Osamu, Yokoi, Jun, Taoka, Noriyuki, Zaima, Shigeaki

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1.27 MB

english, 2014

26

Formation of Si:CP layer through in-situ doping and implantation process for n-type metal–oxide–semiconductor devices

Mochizuki, Shogo, Loesing, Rainer, Zhu, Zhengmao, Domenicucci, Anthony G., Flaitz, Philip L., Li, Jinghong, Paruchuri, Vamsi

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1.10 MB

english, 2014

27

Photo-induced current and its degradation in Al4C3/Al2O3 (0001) grown by metalorganic chemical vapor deposition

Kim, Dohyung, Onishi, Yuya, Oki, Ryuji, Sakai, Shiro

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1.03 MB

english, 2014

28

Impacts of oxygen passivation on poly-crystalline germanium thin film transistor

Kabuyanagi, Shoichi, Nishimura, Tomonori, Nagashio, Kosuke, Toriumi, Akira

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 852 KB

english, 2014

29

Highly n-doped, tensile-strained Ge grown on Si by molecular beam epitaxy

Nishida, Keisuke, Xu, Xuejun, Sawano, Kentarou, Maruizumi, Takuya, Shiraki, Yasuhiro

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 505 KB

english, 2014

30

Preface

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 379 KB

english, 2014

31

Periodic arrays of nanopores made on single-crystalline silicon substrates with a self-assembled lithographic process

Cheng, S.L., Lin, Y.H., Lee, S.W., Chen, H.

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1.38 MB

english, 2014

32

Order and temperature dependence of surface blistering in H and He co-implanted Ge

Dai, J.Y., Wei, X., Xue, Z.Y., Di, Z.F., Zhang, M.

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1020 KB

english, 2014

33

Low-temperature fabrication of Y2O3/Ge gate stacks with ultrathin GeOx interlayer and low interface states density characterized by a reliable deep-level transient spectroscopy method

Wang, Dong, Nagatomi, Yuta, Kojima, Shuta, Yamamoto, Keisuke, Nakashima, Hiroshi

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 591 KB

english, 2014

34

Chemical vapor deposition processes for the fabrication of epitaxial Si-O superlattices

Jayachandran, Suseendran, Delabie, Annelies, Maggen, Jens, Caymax, Matty, Loo, Roger, Meersschaut, Johan, Lenka, Haraprasanna, Vandervorst, Wilfried, Heyns, Marc

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1.05 MB

english, 2014

35

Impacts of AlGeO formation by post thermal oxidation of Al2O3/Ge structure on interfacial properties

Shibayama, Shigehisa, Kato, Kimihiko, Sakashita, Mitsuo, Takeuchi, Wakana, Taoka, Noriyuki, Nakatsuka, Osamu, Zaima, Shigeaki

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1.18 MB

english, 2014

36

Thermal stability of conductive and transparent V-doped ZnO thin films

Chiba, Hiroshi, Mori, Tatsuya, Okuda, Shuhei, Washio, Katsuyoshi

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 910 KB

english, 2014

37

Schottky barrier height systematics studied by partisan interlayer

Long, Wei, Li, Yang, Tung, Raymond T.

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 242 KB

english, 2014

38

High-temperature isothermal capacitance transient spectroscopy study on SiN deposition damages for low-Mg-doped p-GaN Schottky diodes

Shiojima, Kenji, Wakayama, Hisashi, Aoki, Toshichika, Kaneda, Naoki, Nomoto, Kazuki, Mishima, Tomoyoshi

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1021 KB

english, 2014

39

Phosphorus atomic layer doping in SiGe using reduced pressure chemical vapor deposition

Yamamoto, Yuji, Heinemann, Bernd, Murota, Junichi, Tillack, Bernd

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 660 KB

english, 2014

40

HfO2-assisted SiO2 reduction in HfO2/SiO2/Si stacks

Li, Xiuyan, Yajima, Takeaki, Nishimura, Tomonori, Nagashio, Kosuke, Toriumi, Akira

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 925 KB

english, 2014

41

Radiation tolerance of Si1−yCy source/drain n-type metal oxide semiconductor field effect transistors with different carbon concentrations

Nakashima, Toshiyuki, Asai, Yuki, Hori, Masato, Yoneoka, Masashi, Tsunoda, Isao, Takakura, Kenichiro, Gonzalez, Mireia Bargallo, Simoen, Eddy, Claeys, Cor, Yoshino, Kenji

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 498 KB

english, 2014

42

Enhanced Au induced lateral crystallization in electron-irradiated amorphous Ge on SiO2

Sakiyama, Shin, Kaneko, Takahiro, Ootsubo, Takanobu, Sakai, Takatsugu, Nakashima, Kazutoshi, Moto, Kenta, Yoneoka, Masashi, Takakura, Kenichiro, Tsunoda, Isao

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 862 KB

english, 2014

43

Epitaxial growth of Si1−xGex alloys and Ge on Si(100) by electron-cyclotron-resonance Ar plasma chemical vapor deposition without substrate heating

Ueno, Naofumi, Sakuraba, Masao, Murota, Junichi, Sato, Shigeo

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 871 KB

english, 2014

44

Mechanical property effects of Si1−xGex channel and stressed contact etching stop layer on nano-scaled n-type metal–oxide–semiconductor field effect transistors

Lee, Chang-Chun, Cheng, Hsien-Chie, Hsu, Hung-Wen, Chen, Zih-Han, Teng, Hsiao-Hsuan, Liu, Chuan-Hsi

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1.62 MB

english, 2014

45

Analysis for positions of Sn atoms in epitaxial Ge1−xSnx film in low temperature depositions

Kamiyama, Eiji, Sueoka, Koji, Nakatsuka, Osamu, Taoka, Noriyuki, Zaima, Shigeaki, Izunome, Koji, Kashima, Kazuhiko

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 488 KB

english, 2014

46

HCl defect revelation in 200mm SiGe virtual substrates: A systematic study

Hartmann, J.M., Abbadie, A.

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 998 KB

english, 2014

47

Fabrication and evaluation of propagation loss of Si/SiGe/Si photonic-wire waveguides for Si based optical modulator

Kim, Younghyun, Takenaka, Mitsuru, Osada, Takenori, Hata, Masahiko, Takagi, Shinichi

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 926 KB

english, 2014

48

Effects of extended poly gate on the performance of strained P-type metal-oxide-semiconductor field-effect transistors with a narrow channel width

Lee, Chang-Chun, Liu, Chuan-Hsi, Hsu, Hung-Wen, Hung, Min-Hui

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1.21 MB

english, 2014

49

Control of geometry in Si-based photonic nanostructures formed by maskless wet etching process and its impact on optical properties

Hoshi, Yusuke, Tayagaki, Takeshi, Kiguchi, Takanori, Usami, Noritaka

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 516 KB

english, 2014

50

3D heteroepitaxy of mismatched semiconductors on silicon

Falub, Claudiu V., Kreiliger, Thomas, Isa, Fabio, Taboada, Alfonso G., Meduňa, Mojmír, Pezzoli, Fabio, Bergamaschini, Roberto, Marzegalli, Anna, Müller, Elisabeth, Chrastina, Daniel, Isella, Giovanni,

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1.82 MB

english, 2014

51

Characterization of crystalline structures of SiGe substrate formed by traveling liquidus-zone method for devices with Ge/SiGe structures

Yamaha, Takashi, Nakatsuka, Osamu, Taoka, Noriyuki, Kinoshita, Kyoichi, Yoda, Shinichi, Zaima, Shigeaki

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1.71 MB

english, 2014

52

Tunnel field-effect transistors with germanium/strained-silicon hetero-junctions for low power applications

Kim, Minsoo, Kim, Younghyun, Yokoyama, Masafumi, Nakane, Ryosho, Kim, SangHyeon, Takenaka, Mitsuru, Takagi, Shinichi

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 863 KB

english, 2014

53

High-luminance and high-efficiency multi-chip light-emitting diode array packaging platform with nanoscale anodized aluminum oxide on silicon substrate

Wang, Cong, Cho, Sung-Jin, Kim, Nam-Young

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1.11 MB

english, 2014

54

N-type doping of BaSi2 epitaxial films by phosphorus ion implantation and thermal annealing

Hara, Kosuke O., Hoshi, Yusuke, Usami, Noritaka, Shiraki, Yasuhiro, Nakamura, Kotaro, Toko, Kaoru, Suemasu, Takashi

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 396 KB

english, 2014

55

Carrier extraction dynamics from Ge/Si quantum wells in Si solar cells

Tayagaki, Takeshi, Hoshi, Yusuke, Ooi, Kazufumi, Kiguchi, Takanori, Usami, Noritaka

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 639 KB

english, 2014

56

Synthesis and optical properties of Sn-rich Ge1–x–ySixSny materials and devices

Xu, Chi, Beeler, Richard T., Jiang, Liying, Gallagher, James D., Favaro, Ruben, Menéndez, José, Kouvetakis, John

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1024 KB

english, 2014

57

Effect of heavy doping and strain on the electroluminescence of Ge-on-Si light emitting diodes

Schmid, Marc, Oehme, Michael, Gollhofer, Martin, Körner, Roman, Kaschel, Mathias, Kasper, Erich, Schulze, Joerg

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 783 KB

english, 2014

58

High-quality Co2FeSi0.5Al0.5/Si heterostructures for spin injection in silicon spintronic devices

Tanikawa, Kohei, Oki, Soichiro, Yamada, Shinya, Kawano, Makoto, Miyao, Masanobu, Hamaya, Kohei

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 746 KB

english, 2014

59

Dynamic analysis of rapid-melting growth using SiGe on insulator

Matsumura, Ryo, Tojo, Yuki, Kurosawa, Masashi, Sadoh, Taizoh, Miyao, Masanobu

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 612 KB

english, 2014

60

Alternating current operation of low-Mg-doped p-GaN Schottky diodes

Aoki, Toshichika, Kaneda, Naoki, Mishima, Tomoyoshi, Shiojima, Kenji

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 892 KB

english, 2014

61

Study of Ge loss during Ge condensation process

Xue, Z.Y., Di, Z.F., Ye, L., Mu, Z.Q., Chen, D., Wei, X., Zhang, M., Wang, X.

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 857 KB

english, 2014

62

Formation and characterization of locally strained Ge1−xSnx/Ge microstructures

Ike, Shinichi, Moriyama, Yoshihiko, Kurosawa, Masashi, Taoka, Noriyuki, Nakatsuka, Osamu, Imai, Yasuhiko, Kimura, Shigeru, Tezuka, Tsutomu, Zaima, Shigeaki

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1.75 MB

english, 2014

63

Nitrogen doping effect upon hole tunneling characteristics of Si barriers in Si1-xGex/Si resonant tunneling diode

Kawashima, Tomoyuki, Sakuraba, Masao, Murota, Junichi

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 667 KB

english, 2014

64

In-depth analysis of high-quality Ge-on-insulator structure formed by rapid-melting growth

Chikita, H., Matsumura, R., Tojo, Y., Yokoyama, H., Sadoh, T., Miyao, M.

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 865 KB

english, 2014

65

Studies of local electric properties and annealing behaviors of thin Er2O3 film grown on Ge substrates

Zhang, H.Y., Wang, W., Ji, T., Yang, X.J., Jiang, Z.M.

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1.03 MB

english, 2014

66

Stabilized formation of tetragonal ZrO2 thin film with high permittivity

Kato, Kimihiko, Saito, Takatoshi, Shibayama, Shigehisa, Sakashita, Mitsuo, Takeuchi, Wakana, Taoka, Noriyuki, Nakatsuka, Osamu, Zaima, Shigeaki

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 929 KB

english, 2014

67

Room-temperature electrical creation of spin accumulation in n-Ge using highly resistive Fe3Si/n+-Ge Schottky-tunnel contacts

Hamaya, Kohei, Takemoto, Gotaro, Baba, Yuzo, Kasahara, Kenji, Yamada, Shinya, Sawano, Kentarou, Miyao, Masanobu

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 639 KB

english, 2014

68

Ultra high hole mobilities in a pure strained Ge quantum well

Mironov, O.A., Hassan, A.H.A., Morris, R.J.H., Dobbie, A., Uhlarz, M., Chrastina, D., Hague, J.P., Kiatgamolchai, S., Beanland, R., Gabani, S., Berkutov, I.B., Helm, M., Drachenko, O., Myronov, M., Le

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 786 KB

english, 2014

69

Sn-induced low-temperature (~150°C) crystallization of Ge on insulator

Ooato, A., Suzuki, T., Park, J.-H., Miyao, M., Sadoh, T.

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 460 KB

english, 2014

70

Potential profile and photovoltaic effect in nanoscale lateral pn junction observed by Kelvin probe force microscopy

Nowak, Roland, Moraru, Daniel, Mizuno, Takeshi, Jablonski, Ryszard, Tabe, Michiharu

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 899 KB

english, 2014

71

Large-grained (111)-oriented Si/Al/SiO2 structures formed by diffusion-controlled Al-induced layer exchange

Numata, Ryohei, Toko, Kaoru, Usami, Noritaka, Suemasu, Takashi

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1.17 MB

english, 2014

72

Selective epitaxial growth of compressively strained Ge layers on Si in 40-nm trench arrays

Kim, Byongju, Kim, Sun-Wook, Jang, Hyunchul, Kim, Jeong-Hoon, Koo, Sangmo, Kim, Dae-Hyun, Min, Byoung-Gi, Ko, Dae-Hong

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1.22 MB

english, 2014

73

Growth promotion of Al-induced crystallized Ge films on insulators by insertion of a Ge membrane below the Al layer

Numata, Ryohei, Toko, Kaoru, Nakazawa, Koki, Usami, Noritaka, Suemasu, Takashi

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 731 KB

english, 2014

74

Coherent lateral-growth of Ge over insulating film by rapid-melting-crystallization

Sadoh, T., Kurosawa, M., Toko, K., Miyao, M.

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 944 KB

english, 2014

75

Investigation of consequent process-induced stress for N-type metal oxide semiconductor field effect transistor with a sunken shallow trench isolation pattern

Lee, Chang-Chun, Liu, Chuan-Hsi, Deng, Rong Hao, Hsu, Hung-Wen, Chiang, Kuo-Ning

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1.25 MB

english, 2014

76

Surfactant-mediated epitaxy of silicon germanium films on silicon (001) substrates

Wietler, T.F., Schmidt, J., Tetzlaff, D., Bugiel, E.

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 771 KB

english, 2014

77

Molecular-beam epitaxial growth of tensile-strained and n-doped Ge/Si(001) films using a GaP decomposition source

Luong, T.K.P., Ghrib, A., Dau, M.T., Zrir, M.A., Stoffel, M., Le Thanh, V., Daineche, R., Le, T.G., Heresanu, V., Abbes, O., Petit, M., El Kurdi, M., Boucaud, P., Rinnert, H., Murota, J.

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 805 KB

english, 2014

78

Structural transition in Ge growth on Si mediated by sub-monolayer carbon

Itoh, Yuhki, Hatakeyama, Shinji, Washio, Katsuyoshi

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 915 KB

english, 2014

79

Potentialities of disilane for the low temperature epitaxy of intrinsic and boron-doped SiGe

Hartmann, J.M., Benevent, V., Veillerot, M., Halimaoui, A.

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 1.52 MB

english, 2014

80

Schottky barrier height and thermal stability of p-diamond (100) Schottky interfaces

Teraji, Tokuyuki, Koide, Yasuo, Ito, Toshimichi

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 963 KB

english, 2014

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