Hydrophobic and oleophobic anti-reflective polyacrylate...

Microelectronic Engineering 2014 / 2 Vol. 114

Hydrophobic and oleophobic anti-reflective polyacrylate coatings

Joki-Korpela, Fatima, Karvinen, Jennika, Päivänranta, Birgit, Partanen, Anni, Suvanto, Mika, Kuittinen, Markku, Pakkanen, Tuula T.
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Volume:
114
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.09.010
Date:
February, 2014
File:
PDF, 2.29 MB
english, 2014
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