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Volume 114
Main
Microelectronic Engineering
Volume 114
Microelectronic Engineering
Volume 114
1
Removal of UV-cured resin using a hybrid cleaning process for nanoimprint lithography
Kim, Min-Su
,
Kang, Bong-Kyun
,
Ramachandran, Manivannan
,
Kim, Jae-Kwan
,
Lee, Byung-Kyu
,
Park, Jin-Goo
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 1.52 MB
Your tags:
english, 2014
2
Etching properties of Na0.5K0.5NbO3 thin films by using inductively coupled CF4/Ar plasma
Joo, Young-Hee
,
Woo, Jong-Chang
,
Kim, Chang-Il
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 2.02 MB
Your tags:
english, 2014
3
Sub-10nm patterning by focused He-ion beam milling for fabrication of downscaled graphene nano devices
Kalhor, Nima
,
Boden, Stuart A.
,
Mizuta, Hiroshi
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 5.38 MB
Your tags:
english, 2014
4
Multi-step etching of three-dimensional sub-millimeter curved silicon microstructures with in-plane principal axis
Sabry, Yasser M.
,
Khalil, Diaa
,
Saadany, Bassam
,
Bourouina, Tarik
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 1018 KB
Your tags:
english, 2014
5
Dielectrophoretic deposition of carbon nanotubes: The role of field frequency and its dependence on solution conductivity
Kashefian Naieni, Ali
,
Nojeh, Alireza
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 1.84 MB
Your tags:
english, 2014
6
Mechanical properties of surface modified silica low-k thin films
Mhaisagar, Yogesh S.
,
Joshi, Bhavana N.
,
Mahajan, Ashok M.
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 933 KB
Your tags:
english, 2014
7
Hydrophobic and oleophobic anti-reflective polyacrylate coatings
Joki-Korpela, Fatima
,
Karvinen, Jennika
,
Päivänranta, Birgit
,
Partanen, Anni
,
Suvanto, Mika
,
Kuittinen, Markku
,
Pakkanen, Tuula T.
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 2.29 MB
Your tags:
english, 2014
8
Thermal-nanoimprint lithography for perylenediimide-based distributed feedback laser fabrication
Retolaza, Aritz
,
Juarros, Aritz
,
Otaduy, Deitze
,
Merino, Santos
,
Navarro-Fuster, Víctor
,
Ramírez, Manuel G.
,
Boj, Pedro G.
,
Quintana, José A.
,
Villalvilla, José M.
,
Díaz-García, María A.
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 584 KB
Your tags:
english, 2014
9
Fabrication and characterisation of a double-clamped beam structure as a control gate for a high-speed non-volatile memory device
García-Ramírez, M.A.
,
Ghiass, A.M.
,
Moktadir, Z.
,
Tsuchiya, Y.
,
Mizuta, H.
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 1.23 MB
Your tags:
english, 2014
10
Inside Front Cover - Editorial Board
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 29 KB
Your tags:
english, 2014
11
Effect of moisture on electrical properties and reliability of low dielectric constant materials
Cheng, Yi-Lung
,
Leon, Ka-Wai
,
Huang, Jun-Fu
,
Chang, Wei-Yuan
,
Chang, Yu-Min
,
Leu, Jihperng
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 1.24 MB
Your tags:
english, 2014
12
Effect of annealing on the electrical and interface properties of Au/PVC/n-InP organic-on-inorganic structures
Umapathi, A.
,
Rajagopal Reddy, V.
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 1.58 MB
Your tags:
english, 2014
13
Hierarchical fabrication of TiO2 nanotubes on 3-D microstructures for enhanced dye-sensitized solar cell photoanode for seamless microsystems integration
Dawan, Fareed
,
Morampudi, Niteesh
,
Jin, Yoonyoung
,
Woldesenbet, Eyassu
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 3.08 MB
Your tags:
english, 2014
14
Abrasive and additive interactions in high selectivity STI CMP slurries
Praveen, B.V.S.
,
Manivannan, R.
,
Umashankar, T.D.
,
Cho, Byoung-Jun
,
Park, Jin-Goo
,
Ramanathan, S.
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 1.11 MB
Your tags:
english, 2014
15
An investigation of device reliability for a micro-machined AlGaN/GaN/Si high electron mobility transistor using low frequency noise measurement
Chiu, Hsien-Chin
,
Wang, Hsiang-Chun
,
Wu, Chia-Hsuan
,
Huang, Fan-Hsiu
,
Kao, Hsuan-Ling
,
Chien, Feng-Tso
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 838 KB
Your tags:
english, 2014
16
Atomic layer etching of BeO using BCl3/Ar for the interface passivation layer of III–V MOS devices
Min, K.S.
,
Kang, S.H.
,
Kim, J.K.
,
Yum, J.H.
,
Jhon, Y.I.
,
Hudnall, Todd W.
,
Bielawski, C.W.
,
Banerjee, S.K.
,
Bersuker, G.
,
Jhon, M.S.
,
Yeom, G.Y.
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 701 KB
Your tags:
english, 2014
17
Enhanced megasonic processing of wafers in MegPie® using carbonated ammonium hydroxide solutions
Kumari, S.
,
Keswani, M.
,
Singh, S.
,
Beck, M.
,
Liebscher, E.
,
Raghavan, S.
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 1.03 MB
Your tags:
english, 2014
18
Poly-Si heaters for ultra-fast local temperature control of on-wafer test structures
Franco, J.
,
Kaczer, B.
,
Groeseneken, G.
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 809 KB
Your tags:
english, 2014
19
UV-induced modification of fluorocarbon for improvement of subsequent wet removal
Le, Q.T.
,
Simms, I.
,
Yue, H.
,
Brown, I.
,
Kesters, E.
,
Vereecke, G.
,
Struyf, H.
,
De Gendt, S.
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 767 KB
Your tags:
english, 2014
20
Cluster based dynamic area-array I/O planning for flip chip technology
Muchherla, Kishore Kumar
,
Kumar, Jai Ganesh
,
Roveda, Janet M. Wang
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 1.36 MB
Your tags:
english, 2014
21
Leaching and drying marks on photoresist-coated substrates
Belmiloud, N.
,
Tamaddon, A.H.
,
Mertens, P.W.
,
Struyf, H.
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 1.10 MB
Your tags:
english, 2014
22
Laser micropen integrated direct writing for fabrication of thick film gap-tuning capacitor
Cao, Yu
,
Zeng, Xiaoyan
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 2.55 MB
Your tags:
english, 2014
23
Effect of thermal treatment on the mechanical properties of Cu specimen fabricated using electrodeposition bath for through-silicon-via filling
Wang, Huiying
,
Cheng, Ping
,
Wang, Su
,
Wang, Hong
,
Gu, Ting
,
Li, Junyi
,
Gu, Xiao
,
Ding, Guifu
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 1.63 MB
Your tags:
english, 2014
24
Effect of composition of post etch residues (PER) on their removal in choline chloride–malonic acid deep eutectic solvent (DES) system
Taubert, Jenny
,
Raghavan, Srini
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 3.12 MB
Your tags:
english, 2014
25
Impact of channel width on back biasing effect in tri-gate MOSFET
Park, So Jeong
,
Jeon, Dae-Young
,
Montès, Laurent
,
Barraud, Sylvain
,
Kim, Gyu-Tae
,
Ghibaudo, Gérard
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 1.94 MB
Your tags:
english, 2014
26
Nanofabrication of photonic crystal slabs with sealed airholes for optofluidic applications
Andagana, H.
,
Cao, X.A.
Journal:
Microelectronic Engineering
Year:
2014
Language:
english
File:
PDF, 1.02 MB
Your tags:
english, 2014
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