Functional oxide nanostructures written by EBL on insulating single crystal substrates
Malowney, J., Mestres, N., Borrise, X., Calleja, A., Guzman, R., Llobet, J., Arbiol, J., Puig, T., Obradors, X., Bausells, J.Volume:
110
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.02.032
Date:
October, 2013
File:
PDF, 1.75 MB
english, 2013