Functional epoxy polymer for direct nano-imprinting of micro-optical elements
Fader, R., Landwehr, J., Rumler, M., Rommel, M., Bauer, A.J., Frey, L., Völkel, R., Brehm, M., Kraft, A.Volume:
110
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.02.030
Date:
October, 2013
File:
PDF, 1.84 MB
english, 2013