Functional epoxy polymer for direct nano-imprinting of...

Functional epoxy polymer for direct nano-imprinting of micro-optical elements

Fader, R., Landwehr, J., Rumler, M., Rommel, M., Bauer, A.J., Frey, L., Völkel, R., Brehm, M., Kraft, A.
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Volume:
110
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.02.030
Date:
October, 2013
File:
PDF, 1.84 MB
english, 2013
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