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Surface chemistry of TiAlN and TiAlNO coatings deposited by means of high power pulsed magnetron sputtering
Gnoth, C, Kunze, C, Hans, M, to Baben, M, Emmerlich, J, Schneider, J M, Grundmeier, GVolume:
46
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/46/8/084003
Date:
February, 2013
File:
PDF, 975 KB
english, 2013