DC and microwave performance of AlGaN/GaN HEMTs passivated...

Semiconductor Science and Technology 2007 / 07 Vol. 22; Iss. 7

DC and microwave performance of AlGaN/GaN HEMTs passivated with sputtered SiN x

Shiu, J Y, Desmaris, V, Rorsman, N, Kumakura, K, Makimoto, T, Zirath, H, Chang, E Y
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Volume:
22
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/22/7/007
Date:
July, 2007
File:
PDF, 121 KB
english, 2007
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