![](/img/cover-not-exists.png)
Design and optimization based on uncertainty analysis in electro-thermal excited MEMS resonant sensor
Shi, Huichao, Fan, Shangchun, Zhang, Yuwen, Sun, JinhaoVolume:
21
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-014-2109-8
Date:
April, 2015
File:
PDF, 1.08 MB
english, 2015