Volume 21; Issue 4

Microsystem Technologies

Volume 21; Issue 4
1

Custom integrated circuit design for ultrasonic therapeutic CMUT array

Year:
2015
Language:
english
File:
PDF, 2.08 MB
english, 2015
9

An integrated, cellulose membrane-based PCR chamber

Year:
2015
Language:
english
File:
PDF, 535 KB
english, 2015
24

MEMS switches for 0.1–40 GHz for Pico-satellite application

Year:
2015
Language:
english
File:
PDF, 2.07 MB
english, 2015
25

Cantilever-type microheater fabricated with thick silicon

Year:
2015
Language:
english
File:
PDF, 5.19 MB
english, 2015