Silicon cantilevers with piezo-resistive measuring bridge...

Microsystem Technologies 2014 / 04 Vol. 20; Iss. 4-5

Silicon cantilevers with piezo-resistive measuring bridge for tactile line measurement

Frank, Thomas, Doering, L., Heinrich, G., Thronicke, N., Löbner, C., Völlmeke, St., Steinke, A., Reich, S.
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Volume:
20
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-014-2092-0
Date:
April, 2014
File:
PDF, 645 KB
english, 2014
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