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Volume 20; Issue 4-5
Main
Microsystem Technologies
Volume 20; Issue 4-5
Microsystem Technologies
Volume 20; Issue 4-5
1
A biomimetic approach to machine olfaction, featuring a very large-scale chemical sensor array and embedded neuro-bio-inspired computation
Marco, S.
,
Gutiérrez-Gálvez, A.
,
Lansner, A.
,
Martinez, D.
,
Rospars, J. P.
,
Beccherelli, R.
,
Perera, A.
,
Pearce, T. C.
,
Verschure, P. F. M. J.
,
Persaud, K.
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 949 KB
Your tags:
english, 2014
2
Alterations in the complex refractive index of copper oxide thin films as sensing effect for hydrogen sulfide monitoring
Kneer, Janosch
,
Boxberg, Manuel
,
Busch, Sebastian
,
Eberhardt, André
,
Palzer, Stefan
,
Wöllenstein, Jürgen
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 589 KB
Your tags:
english, 2014
3
Thermal actuators featuring large displacements for passive temperature sensing
Steiner, H.
,
Hortschitz, W.
,
Stifter, M.
,
Keplinger, F.
,
Sauter, T.
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 1.40 MB
Your tags:
english, 2014
4
Design, fabrication and testing of a piezoelectric energy microgenerator
Alamin Dow, Ali B.
,
Bittner, Achim
,
Schmid, Ulrich
,
Kherani, Nazir P.
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 502 KB
Your tags:
english, 2014
5
Development of a novel piezoresistive thin film sensor system based on hydrogenated carbon
Biehl, Saskia
,
Rumposch, Christian
,
Bräuer, Günter
,
Hoffmeister, Hans-Werner
,
Luig, Martin
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 494 KB
Your tags:
english, 2014
6
Special issue of the conference ‘Smart Sensors, Actuators and MEMS’, within the SPIE EUROPE Symposium ‘MICROTECHNOLOGIES’ Grenoble, France, 24–26 April 2013
Schmid, Ulrich
,
Becker, Thomas
,
Michel, Bernd
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 142 KB
Your tags:
english, 2014
7
Component design and testing for a miniaturised autonomous sensor based on a nanowire materials platform
Fagas, Giorgos
,
Nolan, Michael
,
Georgiev, Yordan M.
,
Yu, Ran
,
Lotty, Olan
,
Petkov, Nikolay
,
Holmes, Justin D.
,
Jia, Guobin
,
Eisenhawer, Björn
,
Gawlik, Annett
,
Falk, Fritz
,
Khosropour, Naser
,
Buitrago,
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 1.63 MB
Your tags:
english, 2014
8
Towards a complementary balanced energy harvesting solution for low power embedded systems
Verbelen, Yannick
,
Braeken, An
,
Touhafi, Abdellah
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 1.61 MB
Your tags:
english, 2014
9
Single mask fabrication process for movable MEMS devices
Alamin Dow, Ali B.
,
Gougam, Adel
,
Kherani, Nazir P.
,
Rangelow, I. W.
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 447 KB
Your tags:
english, 2014
10
A microbial fuel cell powering an all-digital piezoresistive wireless sensor system
Tommasi, T.
,
Chiolerio, A.
,
Crepaldi, M.
,
Demarchi, D.
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 642 KB
Your tags:
english, 2014
11
Estimation of squeeze film damping in artificial hair-sensor towards the detection-limit of crickets’ hairs
Dagamseh, A. M. K.
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 894 KB
Your tags:
english, 2014
12
Application of quartz tuning forks and extensional microresonators for viscosity and density measurements in oil/fuel mixtures
Toledo, J.
,
Manzaneque, T.
,
Hernando-García, J.
,
Vázquez, J.
,
Ababneh, A.
,
Seidel, H.
,
Lapuerta, M.
,
Sánchez-Rojas, J. L.
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 735 KB
Your tags:
english, 2014
13
Wafer-level reliability characterization for wafer-level-packaged microbolometer with ultrasmall array size
Yang, Chung Mo
,
Jung, Ho
,
Park, Jae Hong
,
Kim, Hee Yeoun
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 831 KB
Your tags:
english, 2014
14
Evaluation of bioinspired functional surfaces for nanoparticle filtering
Busch, Sebastian
,
Ketterer, Manuel
,
Vinzenz, Xenia
,
Hoffmann, Christian
,
Schmitt, Katrin
,
Wöllenstein, Jürgen
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 647 KB
Your tags:
english, 2014
15
Silicon cantilevers with piezo-resistive measuring bridge for tactile line measurement
Frank, Thomas
,
Doering, L.
,
Heinrich, G.
,
Thronicke, N.
,
Löbner, C.
,
Völlmeke, St.
,
Steinke, A.
,
Reich, S.
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 645 KB
Your tags:
english, 2014
16
Unimorph and bimorph piezoelectric energy harvester stimulated by β-emitting radioisotopes: a modeling study
Alamin Dow, Ali B.
,
Schmid, Ulrich
,
Kherani, Nazir P.
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 1.04 MB
Your tags:
english, 2014
17
Design and characteristics of a-Si-based micro-bolometers with shared-anchor structure in vacuum packaged systems
Jung, Ho
,
Kim, Tae Hyun
,
Kim, Gyungtae
,
Yang, Chung Mo
,
Park, Jae Hong
,
Kim, Hee Yeoun
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 777 KB
Your tags:
english, 2014
18
Rotational micro actuator for microsurgery
Leester-Schädel, M.
,
Thies, J.-W.
,
Schubert, T.
,
Büttgenbach, S.
,
Dietzel, A.
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 653 KB
Your tags:
english, 2014
19
Magnetic tunnel junction sensors with pTesla sensitivity
Cardoso, S.
,
Leitao, D. C.
,
Gameiro, L.
,
Cardoso, F.
,
Ferreira, R.
,
Paz, E.
,
Freitas, P. P.
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 922 KB
Your tags:
english, 2014
20
Flexible hot-film anemometer arrays on curved structures for active flow control on airplane wings
Schwerter, M.
,
Beutel, T.
,
Leester-Schädel, M.
,
Büttgenbach, S.
,
Dietzel, A.
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 1000 KB
Your tags:
english, 2014
21
Temperature characterization of flip-chip packaged piezoresistive barometric pressure sensors
Waber, T.
,
Pahl, W.
,
Schmidt, M.
,
Feiertag, G.
,
Stufler, S.
,
Dudek, R.
,
Leidl, A.
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 683 KB
Your tags:
english, 2014
22
Model-based design and test of vibration energy harvester for aircraft application
Hadas, Zdenek
,
Vetiska, Vojtech
,
Huzlik, Rostislav
,
Singule, Vladislav
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 970 KB
Your tags:
english, 2014
23
Principal tests and verification of a resonance-based solar harvester utilizing micro/nano technology
Fiala, P.
,
Drexler, P.
,
Nespor, D.
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 2.12 MB
Your tags:
english, 2014
24
Design of an electro-thermally actuated cell microgripper
Iamoni, Sonia
,
Somà, Aurelio
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 799 KB
Your tags:
english, 2014
25
Integration of polystyrene microlenses with both convex and concave profiles in a polymer-based microfluidic system
Fan, Yiqiang
,
Li, Huawei
,
Foulds, Ian G.
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 384 KB
Your tags:
english, 2014
26
Influence of interfacial adhesion on the mechanical response of magneto-rheological elastomers at high strain
Pössinger, T.
,
Bolzmacher, C.
,
Bodelot, L.
,
Triantafyllidis, N.
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 1.21 MB
Your tags:
english, 2014
27
Production of vertical nanowire resonators by cryogenic-ICP–DRIE
Merzsch, S.
,
Steib, F.
,
Wasisto, H. S.
,
Stranz, A.
,
Hinze, P.
,
Weimann, T.
,
Peiner, E.
,
Waag, A.
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 867 KB
Your tags:
english, 2014
28
Principles of nonlinear MEMS-resonators regarding magnetic-field detection and the interaction with a capacitive read-out system
Stifter, Michael
,
Keplinger, Franz
,
Steiner, Harald
,
Hortschitz, Wilfried
,
Sauter, Thilo
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 1.12 MB
Your tags:
english, 2014
29
High-resolution low-cost optoelectronic instrument for supervising grape must fermentation
Jiménez-Márquez, F.
,
Vázquez, J.
,
Úbeda, J.
,
Sánchez-Rojas, J. L.
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 895 KB
Your tags:
english, 2014
30
Wafer bonding using Cu–Sn intermetallic bonding layers
Flötgen, C.
,
Pawlak, M.
,
Pabo, E.
,
Wiel, H. J.
,
Hayes, G. R.
,
Dragoi, V.
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 676 KB
Your tags:
english, 2014
31
Microgalvanic nickel pulse plating process for the fabrication of thermal microactuators
Hansal, Wolfgang E. G.
,
Steiner, Harald
,
Mann, R.
,
Halmdienst, M.
,
Schalko, J.
,
Keplinger, F.
,
Svasek, P.
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 1.10 MB
Your tags:
english, 2014
32
Compact optical position feedback scheme for MOEMS mirrors
Tortschanoff, Andreas
,
Baumgart, M.
,
Holzmann, D.
,
Lenzhofer, M.
,
Sandner, T.
,
Kenda, A.
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 711 KB
Your tags:
english, 2014
33
Temperature dependant dielectric breakdown of sputter-deposited AlN thin films using a time-zero approach
Schneider, Michael
,
Bittner, Achim
,
Schmid, Ulrich
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 1.04 MB
Your tags:
english, 2014
34
On a high-potential variable-stiffness device
Henke, Markus
,
Gerlach, Gerald
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 740 KB
Your tags:
english, 2014
35
Energy storage options for wireless sensors powered by aircraft specific thermoelectric energy harvester
Thangaraj, K.
,
Elefsiniots, A.
,
Becker, Th.
,
Schmid, U.
,
Lees, J.
,
Featherston, C. A.
,
Pullin, R.
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 585 KB
Your tags:
english, 2014
36
Electrical characterization of micromachined AlN resonators at various back pressures
Ababneh, Abdallah
,
Al-Omari, A. N.
,
Dagamseh, A. M. K.
,
Qiu, H. C.
,
Feili, D.
,
Ruiz-Díez, V.
,
Manzaneque, T.
,
Hernando, J.
,
Sánchez-Rojas, J. L.
,
Bittner, A.
,
Schmid, U.
,
Seidel, H.
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 856 KB
Your tags:
english, 2014
37
Optimization of ceramics bonding in the area of pressure sensor manufacturing
Novotný, Radovan
,
Vlach, Radek
,
Kadlec, Jaroslav
,
Kuchta, Radek
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 636 KB
Your tags:
english, 2014
38
Piezoelectric in-plane microplate resonators based on contour and flexure-actuated modes
Manzaneque, Tomás
,
Ruiz-Díez, V.
,
Hernando-García, J.
,
Ababneh, A.
,
Al-Omari, A. N.
,
Kucera, M.
,
Bittner, A.
,
Schmid, U.
,
Seidel, H.
,
Sánchez-Rojas, J. L.
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 539 KB
Your tags:
english, 2014
39
Evaluation of low-acceleration MEMS piezoelectric energy harvesting devices
Jackson, Nathan
,
O’Keeffe, Rosemary
,
Waldron, Finbarr
,
O’Neill, Mike
,
Mathewson, Alan
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 738 KB
Your tags:
english, 2014
40
Multi-modal vibration based MEMS energy harvesters for ultra-low power wireless functional nodes
Iannacci, J.
,
Serra, E.
,
Criscienzo, R.
,
Sordo, G.
,
Gottardi, M.
,
Borrielli, A.
,
Bonaldi, M.
,
Kuenzig, T.
,
Schrag, G.
,
Pandraud, G.
,
Sarro, P. M.
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 1.20 MB
Your tags:
english, 2014
41
Microthermal sensors for determining fluid composition and flow rate in fluidic systems
Schmitt, B.
,
Kiefer, C.
,
Schütze, A.
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 1.90 MB
Your tags:
english, 2014
42
Design and characterization of a multi-stable magnetic shape memory alloy hybrid actuator
Gall, Y.
,
Bolzmacher, C.
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 990 KB
Your tags:
english, 2014
43
Finite element modeling and experimental proof of NEMS-based silicon pillar resonators for nanoparticle mass sensing applications
Wasisto, Hutomo Suryo
,
Huang, Kai
,
Merzsch, Stephan
,
Stranz, Andrej
,
Waag, Andreas
,
Peiner, Erwin
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 994 KB
Your tags:
english, 2014
44
A phase-locked loop frequency tracking system for portable microelectromechanical piezoresistive cantilever mass sensors
Wasisto, Hutomo Suryo
,
Zhang, Qing
,
Merzsch, Stephan
,
Waag, Andreas
,
Peiner, Erwin
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 830 KB
Your tags:
english, 2014
45
Micro molding for double-sided micro structuring of SU-8 resist
Oerke, A.
,
Büttgenbach, S.
,
Dietzel, A.
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 501 KB
Your tags:
english, 2014
46
Lock-in amplifier powered analogueQ-control circuit for self-actuated self-sensing piezoelectric MEMS resonators
Kucera, M.
,
Hofbauer, F.
,
Wistrela, E.
,
Manzaneque, T.
,
Ruiz-Díez, V.
,
Sánchez-Rojas, J. L.
,
Bittner, A.
,
Schmid, U.
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 1010 KB
Your tags:
english, 2014
47
Development and characterization of a microthermoelectric generator with plated copper/constantan thermocouples
Pelegrini, Silvia
,
Adami, Andrea
,
Collini, Cristian
,
Conci, Paolo
,
Araújo, Clodoaldo I. L.
,
Guarnieri, Vittorio
,
Güths, Saulo
,
Pasa, André A.
,
Lorenzelli, Leandro
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 727 KB
Your tags:
english, 2014
48
Pre-bond megasonic cleaning with improved process control
Dussault, D.
,
Liebscher, E.
,
Fournel, F.
,
Payen, N.
,
Dragoi, V.
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 401 KB
Your tags:
english, 2014
49
High temperature stability of electrically conductive Pt–Rh/ZrO2and Pt–Rh/HfO2nanocomposite thin film electrodes
Moulzolf, Scott C.
,
Frankel, David J.
,
Pereira da Cunha, Mauricio
,
Lad, Robert J.
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 923 KB
Your tags:
english, 2014
50
Design of silicon micro-resonators with low mechanical and optical losses for quantum optics experiments
Borrielli, A.
,
Bonaldi, M.
,
Serra, E.
,
Bagolini, A.
,
Bellutti, P.
,
Cataliotti, F. S.
,
Marin, F.
,
Marino, F.
,
Pontin, A.
,
Prodi, G. A.
,
Pandraud, G.
,
Sarro, P. M.
,
Lorito, G.
,
Zoumpoulidis, T.
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 1.21 MB
Your tags:
english, 2014
51
Multi field modeling of a microelectromechanical speaker system with electrostatic driving principle
Tumpold, David
,
Kaltenbacher, Manfred
,
Glacer, Christoph
,
Nawaz, Mohsin
,
Dehé, Alfons
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 1.34 MB
Your tags:
english, 2014
52
2–2 composites based on [011]-poled relaxor-ferroelectric single crystals: analysis of the piezoelectric anisotropy and squared figures of merit for energy harvesting applications
C. R. Bowen,D. N. Betts,H. A. Kim,V. Yu. Topolov
Journal:
Microsystem Technologies
Year:
2014
Language:
english
File:
PDF, 2.92 MB
Your tags:
english, 2014
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