Volume 20; Issue 4-5

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Microsystem Technologies
Volume 20; Issue 4-5

Microsystem Technologies

Volume 20; Issue 4-5

1

A biomimetic approach to machine olfaction, featuring a very large-scale chemical sensor array and embedded neuro-bio-inspired computation

Marco, S., GutiÃ©rrez-GÃ¡lvez, A., Lansner, A., Martinez, D., Rospars, J. P., Beccherelli, R., Perera, A., Pearce, T. C., Verschure, P. F. M. J., Persaud, K.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 949 KB

english, 2014

2

Alterations in the complex refractive index of copper oxide thin films as sensing effect for hydrogen sulfide monitoring

Kneer, Janosch, Boxberg, Manuel, Busch, Sebastian, Eberhardt, AndrÃ©, Palzer, Stefan, WÃ¶llenstein, JÃ¼rgen

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 589 KB

english, 2014

3

Thermal actuators featuring large displacements for passive temperature sensing

Steiner, H., Hortschitz, W., Stifter, M., Keplinger, F., Sauter, T.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 1.40 MB

english, 2014

4

Design, fabrication and testing of a piezoelectric energy microgenerator

Alamin Dow, Ali B., Bittner, Achim, Schmid, Ulrich, Kherani, Nazir P.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 502 KB

english, 2014

5

Development of a novel piezoresistive thin film sensor system based on hydrogenated carbon

Biehl, Saskia, Rumposch, Christian, Bräuer, Günter, Hoffmeister, Hans-Werner, Luig, Martin

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 494 KB

english, 2014

6

Special issue of the conference ‘Smart Sensors, Actuators and MEMS’, within the SPIE EUROPE Symposium ‘MICROTECHNOLOGIES’ Grenoble, France, 24–26 April 2013

Schmid, Ulrich, Becker, Thomas, Michel, Bernd

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 142 KB

english, 2014

7

Component design and testing for a miniaturised autonomous sensor based on a nanowire materials platform

Fagas, Giorgos, Nolan, Michael, Georgiev, Yordan M., Yu, Ran, Lotty, Olan, Petkov, Nikolay, Holmes, Justin D., Jia, Guobin, Eisenhawer, Björn, Gawlik, Annett, Falk, Fritz, Khosropour, Naser, Buitrago,

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 1.63 MB

english, 2014

8

Towards a complementary balanced energy harvesting solution for low power embedded systems

Verbelen, Yannick, Braeken, An, Touhafi, Abdellah

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 1.61 MB

english, 2014

9

Single mask fabrication process for movable MEMS devices

Alamin Dow, Ali B., Gougam, Adel, Kherani, Nazir P., Rangelow, I. W.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 447 KB

english, 2014

10

A microbial fuel cell powering an all-digital piezoresistive wireless sensor system

Tommasi, T., Chiolerio, A., Crepaldi, M., Demarchi, D.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 642 KB

english, 2014

11

Estimation of squeeze film damping in artificial hair-sensor towards the detection-limit of crickets’ hairs

Dagamseh, A. M. K.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 894 KB

english, 2014

12

Application of quartz tuning forks and extensional microresonators for viscosity and density measurements in oil/fuel mixtures

Toledo, J., Manzaneque, T., Hernando-García, J., Vázquez, J., Ababneh, A., Seidel, H., Lapuerta, M., Sánchez-Rojas, J. L.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 735 KB

english, 2014

13

Wafer-level reliability characterization for wafer-level-packaged microbolometer with ultrasmall array size

Yang, Chung Mo, Jung, Ho, Park, Jae Hong, Kim, Hee Yeoun

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 831 KB

english, 2014

14

Evaluation of bioinspired functional surfaces for nanoparticle filtering

Busch, Sebastian, Ketterer, Manuel, Vinzenz, Xenia, Hoffmann, Christian, Schmitt, Katrin, Wöllenstein, Jürgen

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 647 KB

english, 2014

15

Silicon cantilevers with piezo-resistive measuring bridge for tactile line measurement

Frank, Thomas, Doering, L., Heinrich, G., Thronicke, N., Löbner, C., Völlmeke, St., Steinke, A., Reich, S.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 645 KB

english, 2014

16

Unimorph and bimorph piezoelectric energy harvester stimulated by β-emitting radioisotopes: a modeling study

Alamin Dow, Ali B., Schmid, Ulrich, Kherani, Nazir P.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 1.04 MB

english, 2014

17

Design and characteristics of a-Si-based micro-bolometers with shared-anchor structure in vacuum packaged systems

Jung, Ho, Kim, Tae Hyun, Kim, Gyungtae, Yang, Chung Mo, Park, Jae Hong, Kim, Hee Yeoun

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 777 KB

english, 2014

18

Rotational micro actuator for microsurgery

Leester-Schädel, M., Thies, J.-W., Schubert, T., Büttgenbach, S., Dietzel, A.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 653 KB

english, 2014

19

Magnetic tunnel junction sensors with pTesla sensitivity

Cardoso, S., Leitao, D. C., Gameiro, L., Cardoso, F., Ferreira, R., Paz, E., Freitas, P. P.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 922 KB

english, 2014

20

Flexible hot-film anemometer arrays on curved structures for active flow control on airplane wings

Schwerter, M., Beutel, T., Leester-Schädel, M., Büttgenbach, S., Dietzel, A.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 1000 KB

english, 2014

21

Temperature characterization of flip-chip packaged piezoresistive barometric pressure sensors

Waber, T., Pahl, W., Schmidt, M., Feiertag, G., Stufler, S., Dudek, R., Leidl, A.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 683 KB

english, 2014

22

Model-based design and test of vibration energy harvester for aircraft application

Hadas, Zdenek, Vetiska, Vojtech, Huzlik, Rostislav, Singule, Vladislav

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 970 KB

english, 2014

23

Principal tests and verification of a resonance-based solar harvester utilizing micro/nano technology

Fiala, P., Drexler, P., Nespor, D.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 2.12 MB

english, 2014

24

Design of an electro-thermally actuated cell microgripper

Iamoni, Sonia, Somà, Aurelio

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 799 KB

english, 2014

25

Integration of polystyrene microlenses with both convex and concave profiles in a polymer-based microfluidic system

Fan, Yiqiang, Li, Huawei, Foulds, Ian G.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 384 KB

english, 2014

26

Influence of interfacial adhesion on the mechanical response of magneto-rheological elastomers at high strain

Pössinger, T., Bolzmacher, C., Bodelot, L., Triantafyllidis, N.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 1.21 MB

english, 2014

27

Production of vertical nanowire resonators by cryogenic-ICP–DRIE

Merzsch, S., Steib, F., Wasisto, H. S., Stranz, A., Hinze, P., Weimann, T., Peiner, E., Waag, A.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 867 KB

english, 2014

28

Principles of nonlinear MEMS-resonators regarding magnetic-field detection and the interaction with a capacitive read-out system

Stifter, Michael, Keplinger, Franz, Steiner, Harald, Hortschitz, Wilfried, Sauter, Thilo

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 1.12 MB

english, 2014

29

High-resolution low-cost optoelectronic instrument for supervising grape must fermentation

Jiménez-Márquez, F., Vázquez, J., Úbeda, J., Sánchez-Rojas, J. L.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 895 KB

english, 2014

30

Wafer bonding using Cu–Sn intermetallic bonding layers

Flötgen, C., Pawlak, M., Pabo, E., Wiel, H. J., Hayes, G. R., Dragoi, V.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 676 KB

english, 2014

31

Microgalvanic nickel pulse plating process for the fabrication of thermal microactuators

Hansal, Wolfgang E. G., Steiner, Harald, Mann, R., Halmdienst, M., Schalko, J., Keplinger, F., Svasek, P.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 1.10 MB

english, 2014

32

Compact optical position feedback scheme for MOEMS mirrors

Tortschanoff, Andreas, Baumgart, M., Holzmann, D., Lenzhofer, M., Sandner, T., Kenda, A.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 711 KB

english, 2014

33

Temperature dependant dielectric breakdown of sputter-deposited AlN thin films using a time-zero approach

Schneider, Michael, Bittner, Achim, Schmid, Ulrich

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 1.04 MB

english, 2014

34

On a high-potential variable-stiffness device

Henke, Markus, Gerlach, Gerald

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 740 KB

english, 2014

35

Energy storage options for wireless sensors powered by aircraft specific thermoelectric energy harvester

Thangaraj, K., Elefsiniots, A., Becker, Th., Schmid, U., Lees, J., Featherston, C. A., Pullin, R.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 585 KB

english, 2014

36

Electrical characterization of micromachined AlN resonators at various back pressures

Ababneh, Abdallah, Al-Omari, A. N., Dagamseh, A. M. K., Qiu, H. C., Feili, D., Ruiz-Díez, V., Manzaneque, T., Hernando, J., Sánchez-Rojas, J. L., Bittner, A., Schmid, U., Seidel, H.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 856 KB

english, 2014

37

Optimization of ceramics bonding in the area of pressure sensor manufacturing

Novotný, Radovan, Vlach, Radek, Kadlec, Jaroslav, Kuchta, Radek

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 636 KB

english, 2014

38

Piezoelectric in-plane microplate resonators based on contour and flexure-actuated modes

Manzaneque, Tomás, Ruiz-Díez, V., Hernando-García, J., Ababneh, A., Al-Omari, A. N., Kucera, M., Bittner, A., Schmid, U., Seidel, H., Sánchez-Rojas, J. L.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 539 KB

english, 2014

39

Evaluation of low-acceleration MEMS piezoelectric energy harvesting devices

Jackson, Nathan, O’Keeffe, Rosemary, Waldron, Finbarr, O’Neill, Mike, Mathewson, Alan

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 738 KB

english, 2014

40

Multi-modal vibration based MEMS energy harvesters for ultra-low power wireless functional nodes

Iannacci, J., Serra, E., Criscienzo, R., Sordo, G., Gottardi, M., Borrielli, A., Bonaldi, M., Kuenzig, T., Schrag, G., Pandraud, G., Sarro, P. M.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 1.20 MB

english, 2014

41

Microthermal sensors for determining fluid composition and flow rate in fluidic systems

Schmitt, B., Kiefer, C., Schütze, A.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 1.90 MB

english, 2014

42

Design and characterization of a multi-stable magnetic shape memory alloy hybrid actuator

Gall, Y., Bolzmacher, C.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 990 KB

english, 2014

43

Finite element modeling and experimental proof of NEMS-based silicon pillar resonators for nanoparticle mass sensing applications

Wasisto, Hutomo Suryo, Huang, Kai, Merzsch, Stephan, Stranz, Andrej, Waag, Andreas, Peiner, Erwin

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 994 KB

english, 2014

44

A phase-locked loop frequency tracking system for portable microelectromechanical piezoresistive cantilever mass sensors

Wasisto, Hutomo Suryo, Zhang, Qing, Merzsch, Stephan, Waag, Andreas, Peiner, Erwin

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 830 KB

english, 2014

45

Micro molding for double-sided micro structuring of SU-8 resist

Oerke, A., Büttgenbach, S., Dietzel, A.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 501 KB

english, 2014

46

Lock-in amplifier powered analogueQ-control circuit for self-actuated self-sensing piezoelectric MEMS resonators

Kucera, M., Hofbauer, F., Wistrela, E., Manzaneque, T., Ruiz-Díez, V., Sánchez-Rojas, J. L., Bittner, A., Schmid, U.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 1010 KB

english, 2014

47

Development and characterization of a microthermoelectric generator with plated copper/constantan thermocouples

Pelegrini, Silvia, Adami, Andrea, Collini, Cristian, Conci, Paolo, Araújo, Clodoaldo I. L., Guarnieri, Vittorio, Güths, Saulo, Pasa, André A., Lorenzelli, Leandro

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 727 KB

english, 2014

48

Pre-bond megasonic cleaning with improved process control

Dussault, D., Liebscher, E., Fournel, F., Payen, N., Dragoi, V.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 401 KB

english, 2014

49

High temperature stability of electrically conductive Pt–Rh/ZrO2and Pt–Rh/HfO2nanocomposite thin film electrodes

Moulzolf, Scott C., Frankel, David J., Pereira da Cunha, Mauricio, Lad, Robert J.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 923 KB

english, 2014

50

Design of silicon micro-resonators with low mechanical and optical losses for quantum optics experiments

Borrielli, A., Bonaldi, M., Serra, E., Bagolini, A., Bellutti, P., Cataliotti, F. S., Marin, F., Marino, F., Pontin, A., Prodi, G. A., Pandraud, G., Sarro, P. M., Lorito, G., Zoumpoulidis, T.

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 1.21 MB

english, 2014

51

Multi field modeling of a microelectromechanical speaker system with electrostatic driving principle

Tumpold, David, Kaltenbacher, Manfred, Glacer, Christoph, Nawaz, Mohsin, Dehé, Alfons

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 1.34 MB

english, 2014

52

2–2 composites based on [011]-poled relaxor-ferroelectric single crystals: analysis of the piezoelectric anisotropy and squared figures of merit for energy harvesting applications

C. R. Bowen,D. N. Betts,H. A. Kim,V. Yu. Topolov

Journal:

Microsystem Technologies

Year:

2014

Language:

english

File:

PDF, 2.92 MB

english, 2014