Microgalvanic nickel pulse plating process for the...

Microsystem Technologies 2014 / 04 Vol. 20; Iss. 4-5

Microgalvanic nickel pulse plating process for the fabrication of thermal microactuators

Hansal, Wolfgang E. G., Steiner, Harald, Mann, R., Halmdienst, M., Schalko, J., Keplinger, F., Svasek, P.
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Volume:
20
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-013-2007-5
Date:
April, 2014
File:
PDF, 1.10 MB
english, 2014
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