Lock-in amplifier powered analogueQ-control circuit for self-actuated self-sensing piezoelectric MEMS resonators
Kucera, M., Hofbauer, F., Wistrela, E., Manzaneque, T., Ruiz-Díez, V., Sánchez-Rojas, J. L., Bittner, A., Schmid, U.Volume:
20
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-013-1997-3
Date:
April, 2014
File:
PDF, 1010 KB
english, 2014