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Control of threading dislocation density at the initial growth stage of AlN on c-sapphire in plasma-assisted MBE
Nechaev, D.V., Aseev, P.A., Jmerik, V.N., Brunkov, P.N., Kuznetsova, Y.V., Sitnikova, A.A., Ratnikov, V.V., Ivanov, S.V.Volume:
378
Language:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2012.12.080
Date:
September, 2013
File:
PDF, 882 KB
english, 2013