Atomic scale Monte Carlo simulations of BF 3...

Physica status solidi 2014 / 01 Vol. 11; Iss. 1

Atomic scale Monte Carlo simulations of BF 3 plasma immersion ion implantation in Si

La Magna, Antonino, Fisicaro, Giuseppe, Nicotra, Giuseppe, Spiegel, Yohann, Torregrosa, Frank
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Volume:
11
Language:
english
Journal:
physica status solidi (c)
DOI:
10.1002/pssc.201300289
Date:
January, 2014
File:
PDF, 549 KB
english, 2014
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