At low costs: Study on optical propagation losses of...

Microelectronic Engineering 2014 / 07 Vol. 123

At low costs: Study on optical propagation losses of silicon waveguides fabricated by electron beam lithography

Bolten, Jens, Manecke, Christel, Wahlbrink, Thorsten, Waldow, Michael, Kurz, Heinrich
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Volume:
123
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2014.03.009
Date:
July, 2014
File:
PDF, 459 KB
english, 2014
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