Defect characterization of a silicon gate CMOS process : Jacques Laneuville, Jean Marcoux, Jon Orchard-Webb and Alain Comeau. Semiconductor Int. 250 (May 1985)
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Volume:
26
Year:
1986
Language:
english
DOI:
10.1016/0026-2714(86)90515-9
File:
PDF, 86 KB
Your tags:
english, 1986
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